poly Top layout View SIDEWALL cut mandrel etch CONT MANDREL A A B B PSG Undoped poly LPCVD 1um LTO LPCVD 2um undoped polyMANDREL LPCVD 01um PSG LPCVD 02um undoped poly LPCVD 01um PSG ID: 930092
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Slide1
Undoped
poly
PSG
Undoped
poly
Slide2Top (layout) View
SIDEWALL cut
mandrel etch CONT
MANDREL
A
A
B
B
Slide3PSG
Undoped
poly
LPCVD 1um LTO
LPCVD 2um
undoped
poly/MANDREL
LPCVD 0.1um PSG
LPCVD 0.2um
undoped
poly
LPCVD 0.1um PSG
anneal 1000C, 30 minutes
HF strip top PSG
Unmasked RIE poly
/SIDEWALL
litho
, RIE poly
/CONT
litho
, etch PSG, XeF2 etch mandrel
Cross section AA or BB
Cross section AA
Cross section BB
Strip CONT PR
HF PSG etch