1 VACUUM AND PLASMA SCIENCE AND TECHNOLOGY 1 - PowerPoint Presentation

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VACUUM AND PLASMA SCIENCE AND TECHNOLOGY 1

Ming-Show Wong

Sept. 2015Slide2

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A space contains nothing?

A space devoid absolutely of mater

Any region of space devoid of atoms and molecules

vacuum was impossible

VacuumSlide3

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Vacuum

A void; an empty feeling

Isolation

Operated

by suction to produce a vacuum Vacuum cleanerSlide4

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Vacuum: a space relatively empty of matter

vacuum was impossible ( Aristotle)

an ancient view until end of 16th century

In 1640,

Gasparo Berti produced vacuum (Galileo)In 1644, Torricelli invented barometerIn 1648, Pascal’s brother-in-law Perier measured the atmosphere pressure using a barometer at different attitude

In 1650,

Otto Von Guericke

invented air (vacuum) pump

To the birth of modern physics, chemistry and engineering

In the 18th century: Huge engines, industrial Revolution

In the late 19th century: gaseous discharge, photoelectric effect, discovery of the electron, x-ray, sputtering, chemistry, cryogenics and

cryopumping

,

metology

, incandescent lighting

In the 20th century: Microelectronics RevolutionSlide5

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Kinetic theory of gases

molecular velocity

pressure

gas impingement on surfaces

Gas transport and pumpinggas flow regimesconductancepumping speedVacuum pump and systemsrotary mechanical, rootsdiffusion, turbomolecular, cryopump, sputter-ionsystemssystem pumping considerationsSlide6

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Otto van

Guerike’s

experiment:

16 horses were unable to separate the

evaculated Magdeburg semisphere. (1657)

American

Vacuum Society

(AVS) Founded in 1953

https://www.youtube.com/watch?v=luIqVQT4QWs Slide7

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JVST, A 2(2) 110, 1984.Slide8

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Course Goals

Learn the basics about the vacuum science and technology and its applications in scientific research and practical industrial production.

Introduce important developments and new advances in vacuum science and technology.

It presents fundamental ideas in physics and chemistry that would be useful to both scientists and engineers dealing with problems associated with the use, production and measurement of high vacuums. Slide10

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Teaching methodology

教學

方法

:

Classroom presentation and discussion

Laboratory tour and experiment

Every student must preview and study class note and textbook before the class.

Everyone should give a short talk (with handout) for 15-20 minutes. The topic should be related to vacuum and plasma, components and systems, their design, operation and application..

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Presentation

materials at department website:

http://www.ndhu.edu.tw/~imeng

Textbooks

:

Handbook

of Vacuum Science and Technology

Edited

by:Dorothy

M. Hoffman,

Bawa

Singh, John H. Thomas III and John H. Thomas III

ISBN

:

978-0-12-352065-4

http://www.sciencedirect.com/science/book/9780123520654

The

User's Guide to Vacuum Technology, 2

nd

edition), (John F.

O'Hanion

), Wiley-

Interscience

, 1989

.

蘇青森著 真空技術精華

(Vacuum Technology) (2009)

五南圖書出版股份有限公司

真空

技術與應用 國科會 儀器科技研究中心

(2001

)Slide12

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Journal:

.Journal of Vacuum Science & Technology - Vacuum, Surfaces and Films.

.Vacuum - Surface Engineering, Surface Instrumentation & Vacuum Technology.

Website:

.American Vacuum Society (AVS), www.vacuum.org ....Society for Vacuum Coaters (SVC), www.svc.org.中華民國真空科技學會

,

www.tvs.org.tw

中華民國鍍膜科技學會

,

www.tact.org.tw

Vacuum Technology Page: http://nyquist.ee.ualberta.ca/~schmaus/vacf/index.html

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Home Work #1

Read

Chapter

1.1 - Vacuum Nomenclature and

Definitions Pages 3-7 of the web textbook;Visit and study the four websites listed in the syllabus

;

And

write

a short

assay (

about 1000 words) on

“What is Vacuum Science and Technology”.

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Novel Photocatalyst preparation

Sputtering

Evaporation

lens

laser

target

substrate

heater

pump

gas

PLD

Flat-Flame CVD

Sol-Gel;

HydrothermalSlide16

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Magdeburg Hemispheres (1654)Slide19

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|Small Brass Magdeburg Hemispheres, mid 19th century, maker unknown. For classroom demonstration.Slide20

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Vacuum Pump, late nineteenth century.Slide21

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Electric Egg, circa 1900,

by Max Kohl, Chemnitz,Germany.Slide22

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Case Western Reserve University Vacuum Pumping Station.Slide23

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Early Coolidge

X-Ray Tube (1913)Slide24

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Geryk-Oil-Air Pump

(piston type), (1904)Slide25

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Stimson Two-Stage

Diffusion Vacuum Pump

(1917)Slide26

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Davisson and Germer Electron Polarization Tube. (1927)

1937 Nobel Prize in Physics.Slide27

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The History of Television, (1923- )

Cathode-Ray Tube (CRT)Slide28

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Omegatron,

Basically a miniature

cyclotron. (1950)Slide29

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The First VacIon Pump. (1957)Slide30

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First LEED/Auger Spectometer (1967)