Our mirrors are available in partial or high re31ecting con30gurations - PDF document

1 3 Our mirrors are available in partial o
3 Our mirrors are available in partial or high reecting congurations, narrow or large bandwidth, and are designed for specic laser technology including, but not limited to: excimer, gas, Nd:YAG, Nd:YLF, laser diode, diode-pumped solid-state; and Ti:Sapphire lasers. With an impressive complement of reective coatings and substrates, our mirrors can be utilized in the deep UV, all the way up to the infrared with either dielectric or metallic coatings. Our dielectric mirrors are designed for high powered applications utilizing laser grade substrates. Don't see a mirror conguration that meets your needs? We also offer an exten

2 sive range of mirror substrates that can
sive range of mirror substrates that can be ordered in production quantities with a CVI specic coating. NOTES: prototype to volume production manufacturing! Give us a call and we will be honored to assist youDon’t see exactly what you are looking for? Mirrors cvilaseroptics.com 4 SELECTION GUIDE WAVELENGTHSREFLECTANCEOPERATING CONDITIONSPAGENarrowband Partial Reflecting MirrorsHIGH ENERGY PARTIAL REFLECTING LASER MIRRORS: Wavelengths from Narrowband Laser Line MirrorsTUNABLE LASER LINE Wavelengths from FIBER LASER EXCIMER LASER :YAGEXCIMER LASER :YAG / N:YLF LASER :YAG / N:YLF LASER :YAG / N:YLF LASER :YAG / N:YLF LASER :YAG LASER MIRR

3 ORS:Dual Band Laser Line Mirrors:YAG 106
ORS:Dual Band Laser Line Mirrors:YAG 1064/532DUAL WAVELENGTH :YAG 1064/633DUAL WAVELENGTH 5 SELECTION GUIDE WAVELENGTHSREFLECTANCEOPERATING CONDITIONSPAGEBroadband MirrorsTUNABLE BROADBAND Wavelengths from MAXBRITE™ BROADBAND  98% from 245 – 390nm  98% from 420 – 700nm TI:SAPPHIRE ULTRAFAST �R 99.0% from 740 – 860nmMetal Coated MirrorsVACUUM UV ALUMINUM VUVADEEP UV ALUMINUM DUVAUV ENHANCED ALUMINUM FLAT MIRRORS: PAUVPROTECTED ALUMINUM FLAT MIRRORS: PAVENHANCED ALUMINUM FLAT MIRRORS: EAVPROTECTED SILVER FLAT MIRRORS: PROTECTED GOLD FLAT MIRRORS: Uncoated Mirror SubstratesMATERIALPAGECONVEX SPHERICAL FUSED S

4 ILICA Standard Grade Corning 7980 1-D (F
ILICA Standard Grade Corning 7980 1-D (Fused Silica)CONCAVE SPHERICAL MIRROR N-BK7 or Standard Grade Corning 7980 1-D (Fused Silica)PLANE ROUND MIRROR BLANKS: N-BK7 or Standard Grade Corning 7980 1-D (Fused Silica)PLANE SQUARE MIRROR BLANKS: N-BK7 or Standard Grade Corning 7980 1-D (Fused Silica)PLANE RECTANGULAR MIRROR Standard Grade Corning 7980 1-D (Fused Silica) 6 6 Wavelength (nm) PR1-1064-8080090010001100120013001400020406080100Reflection (%) Reectivity vs wavelength of PR1-1064-80 at 0° incidence angle Wavelength (nm) PR1-1030-5080090010001100120013001400020406080100Reflection (%) Other reectance values and substrate dimensions

5 available upon request. Standard partial
available upon request. Standard partial reectors have an anti-reection coating Custom reection options from 10% to 99%HIGH ENERGY PARTIAL REFLECTING LASER MIRRORS: Product Code: PR1 Standard Grade Corning 7980 1-D Diameter Tolerance:Thickness ToleranceWedge:  5 arc minutes (plano substrates only)Radius Tolerance:S1 Surface Figure:/10 p-v at 633nm before S2 Surface Figure:/10 p-v at 633nm before Transmitted WavefrontClear Aperture:Damage Threshold: Visit cvilaseroptics.com for additional traces. 7 BUILD YOUR PART NUMBER CENTER WAVELENGTH (nm) REFLECTANCE EXAMPLES: PR1-800-95-0525 (FLAT); PR1-800-95-0525-0.10CC (RADII); PR1-800

6 -95-IF-0525-UV (WEDGE)CHOOSE FROM THE OP
-95-IF-0525-UV (WEDGE)CHOOSE FROM THE OPTIONS BELOW. 1. PRODUCT CODEPR1 2. CENTER WAVELENGTH 3. REFLECTANCE STANDARD OPTIONSFlat, Radius or WedgeFlat, Radius or WedgeFlat or Wedge 4. RADIUS OF CURVATUREDIAMETER (for wedge option omit size and radius of curvature options)SUBSTRATE PART #MATERIAL 8 HIGH POWER TUNABLE LASER LINE MIRRORS: Product Code: Standard Grade Corning 7980 1-D Diameter Tolerance: Thickness Tolerance:Wedge:  5 arc minutesS1 Surface Figure:/10 p-v at 633nm before Commercial polishRadius Tolerance:Clear Aperture:Damage Threshold:Continuous Wave: Center Wavelength Tolerance: BUILD YOUR PART NUMBER PRODUCT CENTER WAVELENGT

7 HANGLE OF SIZE RADII CHOOSE FROM THE OPT
HANGLE OF SIZE RADII CHOOSE FROM THE OPTIONS BELOW. 1. PRODUCT CODETLM1 2. CENTER WAVELENGTH in Degrees0 degress (normal incidence) 45 degrees 4. FLAT SIZE CODEStandard Options 5. RADIUS OF CURVATURE TYPICAL BANDWIDTH FOR TLM1 MIRRORSCenter wavelength (nm)�R99% 0°�R99% 45°S�R 98% 45°P20010*12*400-4055064317808510961800881106210309912374155012415494�* R 97 For Nd:YAG/Nd:YLF wavelengths see page T-28 for High Reection Coating Traces. 9 We offer an extensive range of high-quality excimer laser mirrors specically designed for use with today's high-energy excimer outperform the industry standards and

8 provide our customers with optics for th
provide our customers with optics for the most demanding laser environments.Product Code: ARF, KRFStandard Grade Corning 7980 1-D (Fused Silica)Diameter Tolerance:Thickness Tolerance:Wedge:  5 arc minutesS1 Surface Figure:/10 p-v at 633nm before Commercial polishClear Aperture:Damage Threshold: ARF, KRF Transmission (%) Reection vs wavelength of 193nm excimer laser mirror for 0° Minimum r��eectance 97% at 0°, 9645° UNP�, 94 Transmission (%) Reection vs wavelength of 248nm excimer laser mirror for 0° Minimum r�eectance 99 BUILD YOUR PART NUMBER CHOOSE FROM THE OPTIONS BELOW. WAVELENGT

9 H 2. SIZE CODEDIAMETER (mm)THICKNESS (m
H 2. SIZE CODEDIAMETER (mm)THICKNESS (mm)102525.46.35153738.19.53203750.09.53305076.212.7 in Degrees 45 degrees- - - - - - 10 10 :YAG / N Specifications Product Code:Standard Grade Corning 7980 1-D (Fused Silica)Diameter Tolerance:Thickness Tolerance:Wedge:  5 arc minutes (at substrates only)Radius Tolerance:S1 Surface Figure:/10 p-v at 633nm before Commercial polishClear Aperture:Damage Threshold: BUILD YOUR PART NUMBER ANGLE OF CHOOSE FROM THE OPTIONS BELOW. WAVELENGTHNd:YAG / Nd:YLFNd:YAG / Nd:YLF second harmonicNd:YAG / Nd:YLF third harmonicNd:YAG / Nd:YLF fourth harmonic 4050 in Degrees 0 degrees (normal inc

10 idence) 45 degrees 4. RADIUS OF CURVATUR
idence) 45 degrees 4. RADIUS OF CURVATURE USABLE BANDWIDTH (Ravg  99.0%):Y11020 - 1100nmY2510 - 560nmY3340 - 370nmY4255 - 275nm 11 Transmission (%) 48049050051052053054055056057058059060010099989796Y2-1025-45Wavelengt (m) Transmission (%) * Traces based on actual performance; not theoretical- - - - - - 12 :YAG LASER MIRROR: BUILD YOUR PART NUMBERCHOOSE FROM THE OPTIONS BELOW. WAVELENGTH (Nd:YAG fth harmonic 2. SIZE CODEDIAMETER (mm)THICKNESS (mm)052512.76.35102525.46.35203750.89.53 in Degrees45 degreesSpecifications Product Code:Standard Grade Corning 7980 1-D (Fused Silica)Diameter Tolerance:Thickness Tolerance:Wed

11 ge:  5 arc minutes S1 Surface Figur
ge:  5 arc minutes S1 Surface Figure:/10 p-v at 633nm before Commercial polishClear Aperture:Damage Threshold: - - - - - - 13 High reectivity and laser damage thresholdMinimal coating shift; high enviromental stabilityIdeal for high-power Nd:YAG and ber laser applications: YAG LASER MIRRORS:Product Code:Standard Grade Corning 7980 1-D (Fused Silica)Diameter Tolerance:Thickness Tolerance:Wedge:  5 arc minS1 Surface Figure:/10 p-v at 633 nm before Commercial polishClear Aperture: ION BEAM SPUTTERED ND:YAG LASER MIRRORSWavelength (nm) Damage Threshold PART NUMBER Reectivity vs wavelength of Y1S low loss

12 Nd:YAG laser mirror at 45° and 14 App
Nd:YAG laser mirror at 45° and 14 Applications include: laser marking, precision micromachining, Other center wavelengths and substrate dimensions are Product Code:Standard Grade Corning 7980 1-D (Fused Silica)Diameter Tolerance:Thickness Tolerance:Wedge:  5 arc minutesS1 Surface Figure:/10 p-v at 633nm before Commercial polishClear Aperture:Damage Threshold: Wavelength (nm) PART NUMBER 45°P0°45°S95090010001050110011501200020406080100Wavelength (nm)Reflection (%) Reectivity vs wavelength of FLM ber laser mirror at 1030nm for 0º and Visit cvilaseroptics.com for additional traces 15 :YAG 1064/532 DUAL WAVELENGTH MIRRORS:HM d

13 ielectric wavelength mirrors are designe
ielectric wavelength mirrors are designed for high reectivity and durability at both Nd:YAG and doubled Nd:YAG wavelengths Other substrate dimensions are available for OEM capabilitiesProduct Code:Standard Grade Corning 7980 1-D (Fused Silica)Diameter Tolerance:Thickness Tolerance:Wedge:  5 arc minutesS1 Surface Figure:/10 p-v at 633nm before Commercial polishClear Aperture:Damage Threshold: :YAG 1064/532 DUAL WAVELENGTH MIRRORSWavelength PART NUMBER 45052560067575082590097510501125120010095908580757065605550HM-1025-0Wavelengt (m) Transmission (%) - - - - - - 16 Product Code:Standard Grade Corning 7980 1-D (Fused Silica)Diameter T

14 olerance:Thickness Tolerance:Wedge: 
olerance:Thickness Tolerance:Wedge:  5 arc minutesS1 Surface Figure:/10 p-v at 633nm before Commercial polishClear Aperture:Damage Threshold::YAG 1064/633 DUAL WAVELENGTH MIRRORS:YH dielectric wavelength mirrors are designed for high reectivity and durability at both Nd:YAG and HeNe wavelengths at either 0º Alignment mirror for Nd:YAG using HeNe laser ND:YAG 1064/633 DUAL WAVELENGTH MIRRORWavelength PART NUMBER - - - - - - 17 HIGH POWER TI:SAPPHIRE ULTRAFAST MIRRORS:These mirrors are available upon special request for all Ti:Sapphire laser-related center wavelengths.Broadband design with ultralow group velocity dispersion (GVD)Hi

15 gh reectivity: 740 – 860nm for
gh reectivity: 740 – 860nm for 0º or 45º Unpolarized Product Code:Diameter Tolerance:Thickness Tolerance:Wedge:  5 arc minutesS1 Surface Figure: Commercial polishClear Aperture:Center Wavelength:� R 99.0% from 740 – 860nm for 0° Damage Threshold: A comparison of group delay dispersion vs wavelength of traditional broadband, traditional high laser damage threshold, and the CVI Laser Optics TLMB ultrafast mirror TLMB-800 Ti:Sapphire broadband mirror showing 0° and 45° angle of BUILD YOUR PART NUMBERWAVELENGTHANGLE OF CHOOSE FROM THE OPTIONS BELOW. 1. PRODUCT CODETLMB 2. WAVELENGTH in Degrees 0 degrees (normal inc

16 idence)45 degrees 4. SIZE CODEDIAMETER (
idence)45 degrees 4. SIZE CODEDIAMETER (mm)THICKNESS (mm)2506M25.06.0102525.46.355010M*50.010.0203750.89.533050*76.212.74050*101.612.7* Only available at 45° AOI 18 The TLM2 mirrors are specially designed to achieve high reectivity mirrors can be coated for any angle of incidence from 0º to 60º applications. For 45º tuning mirror applications involving very short pulses or very broad bandwidths. Using pulse distortion and maximizes average reectivity. Product Code:Diameter Tolerance:Thickness Tolerance:Wedge:  5 arc minutesRadius Tolerance:S1 Surface Figure:before coating; after coating on select substrates Commercial polishCle

17 ar Aperture:Center Wavelength: Please re
ar Aperture:Center Wavelength: Please refer to the typical Damage Threshold:Center Wavelength Tolerance: 0°45°PTLM2-80045°S70075080085090095080859095100 800 broadband laser mirror showing 0º and 0°45°PTLM2-80045°S700750800850900950-100-50050100GDD (fs2) Group delay dispersion 800 broadband laser mirror showing 0º and Center Wave BUILD YOUR PART NUMBERWAVELENGTHANGLE OF CHOOSE FROM THE OPTIONS BELOW. 1. PRODUCT CODETLM2 2. WAVELENGTH in Degrees45 degrees 4. SIZE CODEDIAMETER (mm)THICKNESS (mm)052512.76.35102525.46.35 19 FLAT MIRRORS WITH MAXBRITE™ BROADBAND COATINGS:MAXBRIte™ coatings offer extremely high reectance over a

18 broad range of wavelengths. Most of the
broad range of wavelengths. Most of the ultraviolet and visible laser wavelengths are covered by one of the two MAXBRIte Minimum of 98% reectance is achieved over a wide wavelength range at angles of incidence from 0 to 45º. Product Code:Standard Grade Corning 7980 1-D (Fused Silica)Diameter Tolerance: Thickness Tolerance:  3 arc minutes/4 p-v at 633mm before Clear Aperture:Average Reectance:  98% at 0° – 45° UNPDamage Threshold: MAXBRIte™ coating 245 – 390nm FLAT MIRRORS WITH MAXBRITE™ BROADBAND COATINGS UV Broadband Mirror, Round 245 - 390nm Clear Aperture (mm) PART NUMBERVisible Broadband Mirror, Ro

19 und 420 - 700nm MAXBRIte™ coating 4
und 420 - 700nm MAXBRIte™ coating 420 – 700nm 20 VACUUM UV ALUMINUM MIRRORS: VUVA Product Code: VUVAStandard Grade Corning 7980 1-D (Fused Silica)Diameter Tolerance:Thickness Tolerance:Wedge:  5 arc minutesS1 Surface Figure: Commercial polishClear Aperture:technology, VUVA mirrors are designed for optimized performance for an additional charge. Call us for more details. VACUUM UV ALUMINUM MIRRORS PART NUMBER VUVA-PM-1025-UV VUVA-PM-2037-UV Theoetical design of VUVA coating at 157nm and 0º 21 DUVAProduct Code: DUVAStandard Grade Corning 7980 1-D (Fused Silica)Diameter Tolerance:Thickness Tolerance:Wedge:  5 arc minutesS1 Surf

20 ace Figure: Commercial polishClear Apert
ace Figure: Commercial polishClear Aperture: technology, broadband DUVA mirrors provide signicantly higher 193nm reectance and durability than standard UV-protected aluminum mirrors. Choose semi-custom or standard optics for your ellipsometry, spectroscopy, and semiconductor lithography or metrology applications. PART NUMBER DUVA-PM-0512-UV DUVA-PM-1025-UV DUVA-PM-2037-UV 18510096Typical reflection curve250882002309284220240210190normal incidence Reection vs wavelength of 193nm deep UV aluminum coating at 0º 22 UV ENHANCED ALUMINUM FLAT MIRRORS: PAUVProduct Code: PAUVDimensional Tolerances:Square:Thickness Tolerance: 5 arc m

21 inutesS1 Surface Figure: Commercial poli
inutesS1 Surface Figure: Commercial polishClear Aperture:(85% for PAUV-PM series) UV-enhanced aluminumAverage Reectance:UV enhanced aluminum mirrors have an additional dielectric coating that prevents oxidation and preserves the reectance of bare aluminum in the ultraviolet. Average reectance is greater than 86% from 250 to 600nm 200707580859095100300400500600700800900100Wavelength (nm)Reflection (%)Typical reflection curves UV enhanced aluminum coating at 0° UV ENHANCED ALUMINUM FLAT MIRRORS Clear Aperture (mm) Surface Figure (S1) PART NUMBER PAUV-PM-0525-C PAUV-PM-1025-CSquare PAUV-SQM-1025-C PAUV-PM-2037-CSquare PAUV-SQM-2037-C

22 PAUV-PM-3050-C 23 Product Code: PAVDime
PAUV-PM-3050-C 23 Product Code: PAVDimensional Tolerances:Square:Thickness Tolerance:  5 arc minutesS1 Surface Figure: Commercial polishClear Aperture:Square: Protected aluminumAverage Reectance:PROTECTED ALUMINUM FLAT MIRRORS: PAVProtected aluminum is the best general-purpose metallic coating for external reectors in the visible and near-infrared spectrum.Average reectance greater than 87% from 400 to 800nm PROTECTED ALUMINUM FLAT MIRRORS Clear Aperture Surface Figure (S1) PART NUMBER PAV-PM-0525-C PAV-PM-1025-CSquare PAV-SQM-1025-C PAV-PM-2037-CSquare PAV-SQM-2037-C PAV-PM-3050-C Protected aluminum coating 24 ENHANCED ALUM

23 INUM FLAT MIRRORS: EAV Product Code: EAV
INUM FLAT MIRRORS: EAV Product Code: EAVThickness Tolerance:  5 arc minutesS1 Surface Figure: Commercial polishClear Aperture:Average Reectance:Enhanced aluminum is an aluminum coating overcoated with a durable multi-layer dielectric lm which both increases reectance throughout the visible spectrum and provides protection from the environment and handling.Peak reectance is 95% with average reectance across the Enhanced aluminum coating ENHANCED ALUMINUM FLAT MIRRORS Clear Aperture (mm) PART NUMBER EAV-PM-0525-CEAV-PM-1025-CEAV-PM-2037-CEAV-PM-3050-C 25 Product Code:Dimensional Tolerances:Square:Thickness Tolerance:

24  5 arc minutesS1 Surface Figure: Co
 5 arc minutesS1 Surface Figure: Commercial polishClear Aperture:Square: Protected silverAverage Reectance:PROTECTED SILVER FLAT MIRRORS: Protected silver has higher reectance than aluminum throughout the visible and near-infrared spectral regionMinimal pulse distortion for ultrafast Ti:Sapphire lasers A proprietary overcoat provides increased durabilityCVI Laser Optics suggests using the drag and drop method with acetone for the cleaning of these mirrors. PROTECTED SILVER FLAT MIRRORS Min. Clear Aperture Surface Figure (S1) PART NUMBERSquareSquare Protected silver coating at 0º 26 PROTECTED GOLD FLAT MIRRORS: Product Code:Dimens

25 ional Tolerances:Square:Thickness Tolera
ional Tolerances:Square:Thickness Tolerance:  5 arc minutesS1 Surface Figure: Commercial polishClear Aperture:Square Protected goldAverage Reectance:Protected gold combines the natural spectral performance of gold with the enhanced protection of a durable dielectric overcoatProtected gold provides 95.5% average reectance from 650 to 1700nm, and over 98% average reectance from 2 to 20 µmbare gold coatings Protected gold coating at 0º PROTECTED GOLD FLAT MIRRORS Clear Aperture (mm) Surface Figure (S1) PART NUMBER 27 The fused silica plano-convex mirror substrates are polished to reectors, dichroic mirrors, or partial re&#

26 31;ecting output couplers.All CVI Laser
31;ecting output couplers.All CVI Laser Optics high reector, metal, and partial reector Mirror focal length = –r/2Other dimensions and radii available in prototype and production quantitiesTighter radius tolerance available Product Code:Standard Grade Corning 7980 1-D (Fused Silica)Diameter Tolerance:Thickness Tolerance:Radius Tolerance:S1 Surface Figure:S2 Surface Figure:Clear Aperture: PART NUMBER TD Convex spherical mirror blank 28 Product Code: N-BK7 or Standard Grade Diameter Tolerance:Thickness Tolerance:Radius Tolerance:S1 Surface Figure:S2 Surface Figure:Clear Aperture:CONCAVE SPHERICAL FUSED SILICA / N-BK7 MIRROR BLANKS:

27 Tf Concave spherical mirror blank CONCAV
Tf Concave spherical mirror blank CONCAVE SPHERICAL MIRROR BLANKS:Standard Grade Corning 7980 1-D (Fused Silica) PART NUMBER PART NUMBER 29 All CVI Laser Optics partial reectors, high reectors, dichroics Other dimensions or materials available in production and prototype quantities PM-UV, PM-C Product Code: PM-UV, PM-C Standard Grade Corning 7980 1-D (Fused Silica)Dimensional Tolerance:Thickness Tolerance:Wedge:  5 arc minutesS1 Surface Figure: per table; measured p-v at 633mm Commercial polishClear Aperture: Standard Grade Corning 7980 1-D (Fused Silica) S1 Surface Figure PART NUMBER S1 Surface Figure PART NUMBER fTS2S1 Plane roun

28 d mirror blank 30 PLANE SQUARE FUSED SIL
d mirror blank 30 PLANE SQUARE FUSED SILICA / N-BK7 MIRROR BLANKS: Product Code:Standard Grade Corning 7980 1-D (Fused Silica)Dimensional Tolerance:Thickness Tolerance:Wedge:  5 arc minutesS1 Surface Figure: See table (measured p-v at 633nm) Commercial polishClear Aperture: Standard Grade Corning 7980 1-D (Fused Silica) S1 Surface Figure PART NUMBER S1 Surface Figure PART NUMBER LLTS1S2 Plane square mirror blankAvailable in N-BK7 and Standard Grade Corning 7980 1-D All CVI Laser Optics high reector, partials, dichroics and metalOther dimensions available in production and prototype 31 PLANE RECTANGULAR FUSED SILICA MIRROR BLANKS: Produc

29 t Code:Standard Grade Corning 7980 1-D (
t Code:Standard Grade Corning 7980 1-D (Fused Silica)Dimensional Tolerance:Thickness Tolerance:Wedge:  5 arc minutesS1 Surface Figure: Commercial polishClear Aperture: PLANE RECTANGULAR FUSED SILICA MIRROR BLANKS PART NUMBER LTWS1S2 Plane rectangular mirror blankAvailable in Standard Grade Corning 7980 1-D (Fused Silica)All CVI Laser Optics high reector, partials, dichroics and metal Other dimensions available in production and prototype 32 PV: The difference between the lowest point and the highest point of the optical surface. The measurement of the clear aperture of the optical surface, then calculating the standard deviation (takin

30 g the square root of all values and squa
g the square root of all values and squaring them). Coma and Spherical Aberration, is 3-5:1 CVI Laser Optics species the PV error given the fact that our polishing process is such that our RMS values are signicantly below /50 for our laser grade optics. CVI Laser Optics average surface roughness is between 3-5Å for laser grade opticsSurface Figure: Peak to Valley (PV) vs Root Mean Squared (RMS)Consistent High Quality by a brand you can trust! PV: PV: PV: Spherical Lenses cvilaseroptics.com Mirrorscvilaseroptics.com Mirrors cvilaseroptics.com Mirrors cvilaseroptics.com Mirrors cvilaseroptics.com Mirrors cvilaseroptics.com Mirrorscv