contacts Howard Wieman hhwiemanlblgov work 510 4952473 cell 631 4318236 Eric Anderssen ECAnderssenlblgov 510 4952821 This vacuum chuck will be used to hold and accurately locate 2 mil thick silicon chips in a probe station It consists of two aluminum plates bonded to a SLA manu ID: 185737
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Slide1
Vacuum chuck for probe station
contacts:
Howard Wieman
hhwieman@lbl.gov
work: 510 495-2473
cell: 631 431-8236
Eric Anderssen
ECAnderssen@lbl.gov
510 495-2821Slide2
This vacuum chuck will be used to hold and accurately locate 2 mil thick silicon chips in a probe station. It consists of two aluminum plates bonded to a SLA manufactured vacuum manifold.
This is a request for the machined aluminum parts.
The parts are modeled with
SolidWorks
2009
Top Assembly: “
vc
Probe
Assembly.SLDASM
”Slide3
machining tasks
quant.
file
material
image
part description
1“vc probe top.SLDPRT”AlVacuum chuck surface with stops for thinned silicon chips1“vc probe suction plate.SLDPRT”Almating plate to probe station Slide4
“vc probe
top.SLDPRT”
tolerance:
top and bottom surface flat and parallel to 2 mil
tolerance:
locating edges for the silicon chips – relative location with respect to each other good to 1 mil
Finish 62
minSlide5
“vc probe suction
plate.SLDPRT”
tolerance:
top and bottom surface flat and parallel to 2 mil
tolerance:
capture lip radius
-0 + 4 mil
Finish 62
minmust suck down to a metal vacuum plateSlide6
Max Nose Radius
Max
Nose radius of 0.020
”
Not critical