AGILENT DRY SCROLL PUMPS - PDF document

AGILENT DRY SCROLL PUMPS Typical ApplicationsNew IDP-15 Dry Scroll Pump 2 SCROLL PUMPS FEATUREAND BEFITS Agilent TriScroll and TriScroll Inverter pumpspump technology on the market today. Gas enters scroll setGas is displaced and……compressed toward center hubGas exhausted at center hub Fuse Holder and Voltage Changeover Tab Built-In Vacuum Pump Isolation Valve Hour Meter SH-110 IDP-15 DRY SCROLLUMPS Dry Scroll Pumps Unique TriScroll Design Single-sided Scroll Bearing Purge Port With over 25,000 Agilent manufactured demonstrated exceptional reliability. Gas Ballast Port frequency. Inverters allow selection start capability. IDP-3TriScroll 300TriScroll 600 4 TYPIPPATINSLoad Locks and Transfer ChambersGun: Vac-Ion 45 SBeam: Vac-Ion 45 STwisTorr 304 FSTurbo-V 551 SIDP-15IDP-15 5 DRY SCROLLUMPSPrimary Backing Pump for Turbo Systems Differentially pumped mass spectrometer NE IDP-15 DRY SCROLL PUMP Optional Integral Isolation ValveThe Integral Inlet Isolation Valve is installed inside the Valve protects against backward migration through the L O Pump vents, inlet valve closes Vacuum in pump, inlet valve opens Global Input Voltages• 100B¼• 115B¼• 220-230B¼ voltage switchPower moduleOn/Off switchHours meter IDP-15 is specied at 50 dBA ±2 dBA, much lower than Outer cowling acts as noise enclosure 7 DRY SCROLLUMPS C ELow VibrationThe IDP-15 is equipped with integral Vibration Vibration isolators OVery easy basic service, 15 minutes using two toolsof 10 mTorr IDP-15 Tip Seal replacement: 15 minutesDesign for ServiceHow Quiet is the IDP-15? Chainsaw; thunder clapCar horn (1 m); live rock musicLawn mower; airplane take off (1km)Motorcycle (8 m away)Freight train (25 m); food blenderCars on freeway; vacuum cleanerAir conditioner (30 m); office noiseBest competing scroll pumpConversation at home; IDP-15Every additional 10 dBA is a doubling of noise 8 PUMPIFIATINS IDP-3IDP-15 TriScroll 300TriScroll 600TriScroll 300 InverterTriScroll 600 Inverter Pumping speed60 Hz l/min, m3/h, cfm50 Hz l/min, m3/h, cfm60, 3.6, 2.150, 3.0, 1.8110, 6.6, 4.090, 5.4, 3.3256, 15.4, 9.1 250, 15, 8.8210, 12.6, 7.4500, 30, 17.7420, 25.2, 14.8250, 15, 8.8500, 30, 17.7 ltimate pressure, mbar (Torr) 1.3 x 10–2 (1 x 10–2)9.3 x 10–3 (7 x 10–3)1.3 x 10–2 (1 x 10–2)9.3 x 10–3 (7 x 10–3) Maximum inlet pressure, atm (psig)1.0 (0)1.0 (0)1.0 (0) 1.0 (0)1.0 (0)1.0 (0)1.0 (0) Maximum outlet pressure, atm (psig)1.4 (6.5)1.5 (7.5)1.4 (6.5) 1.1 (1.5)1.1 (1.5)1.1 (1.5)1.1 (1.5) Inlet connectionNW16NW25NW25 NW25NW40NW25NW40 E¼ ” Female NPT(10 mm hose barb provided)¼ ” Female NPT(NW16 adapter provided)¼ ” Female NPT(NW16) ¼ ” Female NPT with swivel(NW16 adapter provided) ” Female NPT with swivel(NW25 adapter provided)¼ ” Female NPT with swivel(NW16 adapter provided) ” Female NPT with swivel(NW25 adapter provided) Gas ballast ” Female NPT(20 micron sintered plug provided) ” Female NPT(20 micron sintered plug provided)¼ ” Female NPT(two positions) ¼ ” Female NPT(40 micron sintered lter provided)¼ ” Female NPT(40 micron sintered lter provided)¼ ” Female NPT(40 micron sintered lter provided)¼ ” Female NPT(40 micron sintered lter provided) Motor rating (1 phase), HP (kW)0.16 (0.12)0.25 (0.19)0.75 (0.56) 0.75 (0.56)1.0 (0.76)0.67 (0.5)0.67 (0.5) O1Ø3Ø60 Hz50 Hz100, 115, 220-230 V100, 220-230 V–24 VD100-115, 200-230 V–100-115, 220-230 V100, 200-230 V– 100-115, 200-230 V200-230, 460 V200-230, 380-415 V100-115, 200-230 V200-230, 460 V200-230, 380-415 V100-115, 200-240 V–200-240 V– Type Type Type Type Type O60 Hz (rpm)320017251725 172517251800 @ 62 Hz1800 @ 62 Hz CAir-cooledAir-cooledAir-cooled Air-cooledAir-cooledAir-cooledAir-cooled Ambient operating temperature, °5 to 40 (41 to 108)5 to 40 (41 to 104)5 to 45 (41 to 113) 5 to 40 (41 to 104)5 to 40 (41 to 104)5 to 40 (41 to 104)5 to 40 (41 to 104) Storage temperature, °-20 to 60 (-4 to 140)-20 to 60 (-4 to 140)-20 to 60 (-4 to 140) -20 to 60 (-4 to 140)-20 to 60 (-4 to 140)-20 to 60 (-4 to 140)-20 to 60 (-4 to 140) Weight pump only, kg (lbs) 26.4 (57)32 (70)26 (57)31 (68) Shipping weight, kg (lbs)10.5 (23)20 (44)45 (100) 34.2 (75)40 (87)34 (74)39 (85) Noise level (per IS11201), dB(A)555650 ±2 Variable with frequency Variable with frequency Vibration level (per IS Variable with frequencyVariable with frequency 9 DRY SCROLLUMPS IDP-3IDP-15 TriScroll 300TriScroll 600TriScroll 300 InverterTriScroll 600 Inverter Pumping speed60 Hz l/min, m3/h, cfm50 Hz l/min, m3/h, cfm60, 3.6, 2.150, 3.0, 1.8110, 6.6, 4.090, 5.4, 3.3256, 15.4, 9.1 250, 15, 8.8210, 12.6, 7.4500, 30, 17.7420, 25.2, 14.8250, 15, 8.8500, 30, 17.7 ltimate pressure, mbar (Torr) 1.3 x 10–2 (1 x 10–2)9.3 x 10–3 (7 x 10–3)1.3 x 10–2 (1 x 10–2)9.3 x 10–3 (7 x 10–3) Maximum inlet pressure, atm (psig)1.0 (0)1.0 (0)1.0 (0) 1.0 (0)1.0 (0)1.0 (0)1.0 (0) Maximum outlet pressure, atm (psig)1.4 (6.5)1.5 (7.5)1.4 (6.5) 1.1 (1.5)1.1 (1.5)1.1 (1.5)1.1 (1.5) Inlet connectionNW16NW25NW25 NW25NW40NW25NW40 E¼ ” Female NPT(10 mm hose barb provided)¼ ” Female NPT(NW16 adapter provided)¼ ” Female NPT(NW16) ¼ ” Female NPT with swivel(NW16 adapter provided) ” Female NPT with swivel(NW25 adapter provided)¼ ” Female NPT with swivel(NW16 adapter provided) ” Female NPT with swivel(NW25 adapter provided) Gas ballast ” Female NPT(20 micron sintered plug provided) ” Female NPT(20 micron sintered plug provided)¼ ” Female NPT(two positions) ¼ ” Female NPT(40 micron sintered lter provided)¼ ” Female NPT(40 micron sintered lter provided)¼ ” Female NPT(40 micron sintered lter provided)¼ ” Female NPT(40 micron sintered lter provided) Motor rating (1 phase), HP (kW)0.16 (0.12)0.25 (0.19)0.75 (0.56) 0.75 (0.56)1.0 (0.76)0.67 (0.5)0.67 (0.5) O1Ø3Ø60 Hz50 Hz100, 115, 220-230 V100, 220-230 V–24 VD100-115, 200-230 V–100-115, 220-230 V100, 200-230 V– 100-115, 200-230 V100-115, 200-230 V200-230, 460 V200-230, 380-415 V100-115, 200-230 V200-230, 460 V200-230, 380-415 V100-115, 200-240 V–200-240 V– Type Type Type Type Type O60 Hz (rpm)320017251725 172517251800 @ 62 Hz1800 @ 62 Hz CAir-cooledAir-cooledAir-cooled Air-cooledAir-cooledAir-cooledAir-cooled Ambient operating temperature, °5 to 40 (41 to 108)5 to 40 (41 to 104)5 to 45 (41 to 113) 5 to 40 (41 to 104)5 to 40 (41 to 104)5 to 40 (41 to 104)5 to 40 (41 to 104) Storage temperature, °-20 to 60 (-4 to 140)-20 to 60 (-4 to 140)-20 to 60 (-4 to 140) -20 to 60 (-4 to 140)-20 to 60 (-4 to 140)-20 to 60 (-4 to 140)-20 to 60 (-4 to 140) Weight pump only, kg (lbs) 26.4 (57)32 (70)26 (57)31 (68) Shipping weight, kg (lbs)10.5 (23)20 (44)45 (100) 34.2 (75)40 (87)34 (74)39 (85) Noise level (per IS11201), dB(A)555650 ±2 Variable with frequency Variable with frequency Vibration level (per IS Variable with frequencyVariable with frequency PUMPEL CL4x4x2x2x 32(1.25)7(0.27)10(4.00)128(5.05)7(0.28)17(0.66)140(5.50)127(5.00) CL 18(7.13)42(1.67)(140)5.5032(1.25)35(14.09)Purge InletIntake NW161/8” NPExhaus1/4” with 10mm Hose Barb Power CordReceptacleIEC 320PowerSwitch Dimensions: millimeters (inches)The Agilent IDP-3 Dry Scroll Pump is an innovative, compact, high-performance, oil-free vacuum pump that is suitable for a wide variety of applications. It is the smallest scroll pump made for general vacuum applications, which makes it easy to integrate into OEM systems, and it weighs only 21 pounds (9.5 kg). Yet with a pumping speed of 60 l/m and a very low base pressure of 250 milliTorr, it is the Scroll pumps are not suitable for pumping corrosive, explosive or particulate-forming gases. 11 DRY SCROLLUMPS ????? 0.10111010.11001000Pressure (mbarPumping Speed (m3/hr) IDP-3 Pumping Speed - Air/N DescriptionPart Numberwith Isolation ValvePower Cord SelectionPart NumberAccessories – Refer to the Scroll Accessories section beginning on page 27Maintenance/Service Parts – Refer to the Scroll Service Parts section beginning on page 34Ordering Information 60 Hz 50 Hz PUMPEL 88.8 (3.50) 154.8 (6.10) 43.7 (1.72) 80.9 (3.19) 48.5 (1.91) 7.3 4x (0.29) 7.7 (0.30) 137.9 (5.43) 74.2 (2.92) to inlet 163.6 (6.44) 112.2 (4.42) 383.8 (15.11) 147 (5.79) 132.6(5.22) 257.2 (10.12) 239.6 (9.43) : Scroll pumps are not suitable for pumping corrosive, explosive or particulate-forming gases. 13 DRY SCROLLUMPS SH-110 Pumping Speed - Air/N2 0.100.011101010.11001000 Pressure (mbarPumping Speed (m3/hr) 60 Hz50 Hz Ordering InformationDescriptionPart NumberPower Cord SelectionPart NumberAccessories – Refer to the Scroll Accessories section beginning on page 27Maintenance/Service Parts – Refer to the Scroll Service Parts section beginning on page 34 60 Hz 50 Hz PUMPEL 88.8 (3.50) 154.8 (6.10) 43.7 (1.72) 80.9 (3.19) 48.5 (1.91) 7.3 4x (0.29) 7.7 (0.30) 137.9 (5.43) 74.2 (2.92) to inlet 163.6 (6.44) 112.2 (4.42) 383.8 (15.11) 147 (5.79) 132.6(5.22) 257.2 (10.12) 239.6 (9.43) : Scroll pumps are not suitable for pumping corrosive, explosive or particulate-forming gases. 15 DRY SCROLLUMPS 0.100.011101010.11001000 Pressure (mbarPumping Speed (m3/hr) 60 Hz50 Hz SH-112 Pumping Speed - Air/N2 Ordering InformationDescriptionPart NumberPower Cord SelectionPart NumberAccessories – Refer to the Scroll Accessories section beginning on page 27Maintenance/Service Parts – Refer to the Scroll Service Parts section beginning on page 34 60 Hz 50 Hz PUMP MOEL Technical SpecificationsPumping speed 3/hr 3/hrUltimate pressure1.3 x 10-2 mbar (1 x 10-2 Torr)Maximum inlet pressure1.0 atmosphere (0 psig)Maximum outlet pressure6.5 psigInlet ConnectionNW25Exhaust ConnectionNW16Gas ballast¼" Female NPT (two positions)Weight Shipping weight: 45 kg (100 lbs)Leak rate (with exhaust sealed)-6 cc/sec HeliumCertificationConforms with CE, CSA and RoHSThe Agilent IDP-15 Scroll Pump is a high performance dry primary vacuum pump, providing rapid pump-down at 3/hour (60 Hz). With a single-sided scroll design it offers fast, easy yearly maintenance and low cost of The IDP-15 is exceptionally quiet ()Dimensions: millimeters (inches) 170 (6.68) INTAKE NW25EXHAUST NW16364 (14.33) Ø 305 (12.00)231 (9.10) 485 (19.08 389 (15.31 488 (19.20 179 (7.05) 178 (7.00) 56 (2.22) 4X Ø 11 (0.42) THRU 17 DRY SCROLLUMPS IDP-15 Pumping Speed - Air/N2 00.11020181614108642010000.01110010000Pressure (mbarPumping Speed (m3/hr) Ordering InformationDescriptionPart NumberIDP15 Scroll Pump, StdX3815-64000IDP15 Scroll Pump, Std w/inlt vlvX3815-64010ServicePart NumberIDP-15 Tip Seal Replacement KitX3815-67000SparesPart NumberShipping Box Set, IDP-15X3815-67001Accessories – Refer to the Scroll Accessories section beginning on page 27Part NumberInlet Trap, NW25, HEPASCRINTRPNW25Exhaust Silencer Kit, SH110EXSLRSH110Maintenance/Service Parts – Refer to the Scroll Service Parts section beginning on page 34Line Cords Part Number 60 Hz 50 Hz PUMP MOEL : Scroll pumps are not suitable for pumping corrosive, explosive or particulate-forming gases. 241 (9.5) 3 Phase 422 (16.6) Single Phase 437 (17.2) 3 Phase 130 (5.12) 81 (3.2)105 (4.13)84 (3.3) 61 (2.4) 227 (8.9) Single Phase 36 (1.4) 78 (3.1)134 (5.3 184 (7.3 158 (6.15) 35 (1.4)Inlet (NW25) ø 274 (10.8 T 11 T 51 (2.0) 136 (5.4 170 (6.70) 98 (3.9)Exhaust (NW16) Extensionincluded but not installedExhaust (1/4 NPTPort Swivels 360 11 46 (1.8) 136 (5.35) 176 (6.94) 13 (0.5) Ma13 (0.5) 340 (13.4) 19 DRY SCROLLUMPS 0.010.111100100.111001000Pressure (mbar)Pumping Speed (m3/hr) 60 Hz50 Hz TriScroll 300 Pumping Speed – Air/N2 Ordering InformationDescriptionPart NumberTriScroll 300 exhaust extensionS4707002Accessories – Refer to the Scroll Accessories section beginning on page 27 – Refer to the Scroll Service Parts section beginning on page 34 60 Hz 50 Hz PUMP MOEL 465 (18.32) Single Phase 471 (18.54) Three Phas 82 (3.22)105 (4.13) 38 (1.48) 184 (7.25) 22 (0.86Intake (NW40) ø 300 (11.8) 11 102 (402) 145 (5.69) 176 (6.94) 13 (0.5 355 (13.98) : Scroll pumps are not suitable for pumping corrosive, explosive or particulate-forming gases. 21 DRY SCROLLUMPS 0.0010.010.11100100.11101001000 Pressure (mbar)Pumping Speed (m3/hr) 60 Hz50 Hz TriScroll 600 Pumping Speed – Air/N2 Ordering InformationDescriptionPart NumberTriScroll 600 exhaust extensionS4807001Accessories – Refer to the Scroll Accessories section beginning on page 27 – Refer to the Scroll Service Parts section beginning on page 34 60 Hz 50 Hz PUMP MOEL 34 (1.40) 327 (12.9) Ø 274 (10.8) INTAKE(NW25) 13 (0.50) 13 (0.50) 233 (9.20) 36 (1.40) 83 (3.30) 81 (3.20) 160 (6.30) 190 (7.50) 428 (16.90) 105 (4.13) 61 (2.40) 81 (3.20) 119 (4.70) 130 (5.12) 105 (4.13) 115 (4.50) 176 (6.94) 184 (7.30) 343 (13.50 84 (3.30) 136 (5.35) 116 (4.60) : Scroll pumps are not suitable for pumping corrosive, explosive or particulate-forming gases. 23 DRY SCROLLUMPS TriScroll 300 Inverter Pumping Speed – Air/N2 Pressure (mbar)Pumping Speed (m3/hr) 62 Hz60 Hz 55 Hz50 Hz 45 Hz40 Hz0.010.111201816141210864201001000 Ordering InformationDescriptionPart NumberPower Cord SelectionPart NumberAccessories – Refer to the Scroll Accessories section beginning on page 27Maintenance/Service Parts – Refer to the Scroll Service Parts section beginning on page 34 62 Hz 60 Hz 55 Hz 50 Hz 45 Hz 40 Hz PUMP MOEL 176 (6.94) 13 (0.50) 24 (0.95) 356 (14.01) 190 (7.48) 466 (18.35) Ø 300 (1.81) 82 (3.22) 105 (4.13) 145 (5.69) 38 (1.50) 160 (6.30) 114 (4.48) 150 (5.90) 103 (4.07) 115 (4.53) 184 (7.25) INTAKE (NW40) : Scroll pumps are not suitable for pumping corrosive, explosive or particulate-forming gases. 25 DRY SCROLLUMPS 0.010.11140353025201510501001000Pressure (mbar)Pumping Speed (m3/hr) 62 Hz60 Hz 55 Hz 45 Hz 40 Hz TriScroll 600 Inverter Pumping Speed – Air/N2 Ordering InformationDescriptionPart NumberPower Cord SelectionPart NumberAccessories – Refer to the Scroll Accessories section beginning on page 27Maintenance/Service Parts – Refer to the Scroll Service Parts section beginning on page 34 62 Hz 60 Hz 55 Hz 50 Hz 45 Hz 40 Hz 26 Truly universal single-phase voltage and OU FREQUECY INVERER-IV SCROLL PUMPS pumps. Inverter-driven TriScroll 300, 600 and IDP-15 27 Agilent Inlet HEPA filters for scroll pumps protect the pump from ingested particles and prevent particles from migrating These HEPA filters trap particles and dust that emanate Replacement filters are also available. HøAB 17.4(0.69)3/8” NP 11 Ordering InformationDescriptionPart NumberNW40 inlet trap with HEPA filter insertSCRINTRPNW40NW25 inlet trap with HEPA filter insertSCRINTRPNW25NW16 inlet trap with HEPA filter insertSCRINTRPNW16Replacement HEPA filter element (NW25 or NW40)REPLHEPAFILTER1Replacement HEPA filter element (NW16)REPLHEPAFILTER2 Ordering InformationDescriptionPart NumberExhaustPTS300EXFILExhaust filter kit, TriScroll 600PTS600EXFILReplacement HEPA filter11042011027 DRY SCROLLUMPSSCROLL ACCESS SCROLL ACCESS Exhaust Silencer Kits are designed for those applications in which it is desirable to diminish the sound level producedAn exhaust silencer is not necessary in situations where exhaust is carried away in a ducted manifold, because as when a local silencer is used.Exhaust Silencers work by breaking up noise pulsation in the discharge line. The kits contain two basic components, of the actual noise reduction.2. An optional silencer can be connected to the exhaust Ordering InformationDescriptionPart NumberExhaust silencer kit for IDP-3EXSLRIDP3Exhaust silencer kit EXSLRSH110Exhaust silencer kit for TriScrollEXSLRTRISCROLL Replacement Filter Elementfor IDP-3 SilencerREPLSLRFILTER2for SH-110/SH-112/IDP-15 SilencerREPLSLRFILTER1for TriScroll SilencerREPLSLRFILTERIDP-3 with muffler Exhaust Kit Installed TriScroll with muffler 29 DRY SCROLLUMPS Ordering InformationDescriptionPart NumberNOTE level transmitted at the base of the scroll pump. The set Please note, the mounts will increase the height of the TriScroll pumps by 0.75 inches compared to the standard Standard feet Isolation Kit installed Vibration Isolation Kit Installed SCROLL ACCESS Exhaust Kit Installed Ordering InformationDescriptionPart NumberPurge kit for TriScrollsPTSPURGEKIT 31 DRY SCROLLUMPS Agilent offers a range of isolation valves that are used with the scroll pump to ensure proper vacuum isolation and eliminate turbulence into the pump foreline. For applications where the process is sensitive to particulate or requires the best vacuum isolation, the installation of a fast acting, automatic, normally closed valve is recommended to maintain vacuum and prevent backstreaming of debris which may have accumulated inside the pump.  Vacuum Isolation Valves for Scroll PumpsThe SH-110 and SH-112 have an integral solenoid valve at the inlet that provides isolation of the pump in case of power kits employ the same valve as used on the SH Series and Ordering InformationDescriptionPart NumberIsolation Isolation Isolation NOTE Vacuum Isolation Valve – SH-110/SH-112 Vacuum Isolation Valve – IDP Series SCROLL ACCESSProtection for Your Vacuum System 1.85(47.0) 4.27(108.4) 2.92(74.2)1.29(32.8)1.20(30.5)IN(mm) xxX Dim.2.76(70.1)2.56(65.0)KF 25KF 40KF SizeConduit Style Dimensions: inches (millimeters) 33 DRY SCROLLUMPS SCROLL PUMP SERVICE AND SUPP PLANS Technical AssistanceThis system allows all Agilent locations to provide excellent first and second level technical support to customers worldwide. In addition, the technical support centers are in daily contact with our R&D departments for a third level support. For more information, or if you have a need for customized solutions, please contact your Agilent representative. 35 DRY SCROLLUMPS Agilent offers several scroll pump service and maintenance options depending on your in-house capability and maintenance approach. From “do it yourself” to exchange of the entire pump, we accommodate your maintenance needs.Major maintenance of the SH Series is done through Agilent’s