PPT-A method of step height and plate thickness measurement wit

Naoyui Koyama Michelson interferometer Use two lasers simultaneously Laser a wavelength λ a Laser b wavelength λ b Laser a and laser b do not interfere each other. B WAFER w G MEASUREMENT AXIS PROBE A PROBE B A Figure 1Figure 1 above shows a wafer placed between two non-contact measurement probes. By BOW MEASUREMENT The deviation of the center point of the med "LACKPLATE 9ELLOWPLATE #YANPLATE -AGENTAPLATE "LACKPLATE 9ELO + :CFK?@E>#:Chris Zeng
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