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TRIAXIAL FORCE MEASUREMENT CANTILEVER BY TRIAXIAL FORCE MEASUREMENT CANTILEVER BY

TRIAXIAL FORCE MEASUREMENT CANTILEVER BY - PowerPoint Presentation

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Uploaded On 2016-02-27

TRIAXIAL FORCE MEASUREMENT CANTILEVER BY - PPT Presentation

SIDEWALLDOPING WITH RAPID THERMAL DIFFUSION Yuichiro Aoyama Nguyen BinhKhiem Kentaro Noda Yusuke Takei Tetsuo Kan Eiji Iwase Kiyoshi Matsumoto and Isao Shimoyama The University of Tokyo ID: 233653

sensing cantilever piezoresistors direction cantilever sensing direction piezoresistors force forces mechanical triaxial measuring surface thermal fabricated diffusion rapid doping tip measure sidewall

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