PDF-DEPOSITION AND COMPOSITION OF POLYMER FILMS IN FLUOROCARBON PLASMAS* K
Author : marina-yarberry | Published Date : 2015-07-22
mjkuiucedu httpuigelzeceuiucedu November 2004Work supported by Semiconductor Research Corporation University of IllinoisOptical and Discharge PhysicsAGENDA
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DEPOSITION AND COMPOSITION OF POLYMER FILMS IN FLUOROCARBON PLASMAS* K: Transcript
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