Analysis Forgotten EA Almelo Many analysis methods characterize surf - PDF document

1 Analysis: Forgotten EA Almelo, Many anal
Analysis: Forgotten EA Almelo, Many analysis methods characterize surfaces interfaces of layered materials. Glancing incidence x-ray analysis has the potential The heart sample stage energy dispersive blocks the view primary monochromator the source reflectometer heart. path, the divergence slit, attenuator, motorized sample the monochromator a fixed position. can be chosen the source allows for further detail as measured rocking curve experiments (the the specular reflection angle detector in experiments provide information lateral correlation such experiments the other discussed below which in layered (XRR) experiments signal in this angle range. critical an

2 gle depends optical theory the is relate
gle depends optical theory the is related the change refraction. Above the critical angle larger decrease the sample consists seen with these interfaces from which critical angle), layer thickness interface roughness (from fringe are obtained. Another phenomenon length, a anti-nodes, in electric field maximal, move parallel a function with a a length instrument has which is to carry x-ray measurements for a detailed glancing incidence conditions. encoded goniometer, exploit the is used. possible detection using a sorts out instrument suitable for standing-wave Extra attention been given sample stage the sample direct beam in height unit (collimator, be complete

3 d. system is needed small in near-surfac
d. system is needed small in near-surface in case contamination), the fluorescence signal very low. detector has be large the beam in height) incident angle be placed (experiment and dynamic range of 7 5 Only the plateau total reflection the slightly curved sample surface (thick line) above the instrument, a developed for glancing incident optimized for out both measurements: routine sophisticated research investigations. is its direct beam secondary optics, adjust the monochromatize the radiation, a dynamic range rocking curve experiments, seemed possible using equipment, can laboratory instrument. data obtained the experimental simulations obtained sample mo

4 dels the chemical and roughness 8/TiN, 2
dels the chemical and roughness 8/TiN, 271, an arbitrary choice. AD-TXRF measurement measurement for Ti the simulated curves obtained for the GLANCING INCIDENCE fitting a theoretical the measured a roughness a roughness a kind oxide layer. the plateau is slightly second example and Cu measured on a sample, have been a multilayer mirror (d-value Fe and Cu. ment it easily seen surface, since and at yield fluorescence. fluorescence it is present below surface, since be concluded the Cu In other words silicon layers. last example provides detailed analysis the layer thicknesses. the experiment shows a clear interference two different ways the layer sequence, rough

5 ness could either model. likely because
ness could either model. likely because the presence the experiment. This duality The additional information from interfacial water layers is really techniques, described in carbon are It has GIXA should near-surface analysis techniques. detailed analyses the complementary information developed a standing-wave experiments such as those here, were performed with synchrotron measurements. interface analysis with the near future this technology exploited for near-surface analysis. providing samples. Both collaborated also grateful us with soft x-ray for analysis. van Nostrand, (1 935). v.d. Hoogenhof, Phys. Chem. (1 986). v.d. Hoogenhof (1 993). W. W. v.d. Hoogenh