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LOW-PRESSURE INDUCTIVELY COUPLED PULSED MICROPLASMAS FOR VUV PHOTONS PRODUCTION* LOW-PRESSURE INDUCTIVELY COUPLED PULSED MICROPLASMAS FOR VUV PHOTONS PRODUCTION*

LOW-PRESSURE INDUCTIVELY COUPLED PULSED MICROPLASMAS FOR VUV PHOTONS PRODUCTION* - PowerPoint Presentation

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Uploaded On 2018-11-02

LOW-PRESSURE INDUCTIVELY COUPLED PULSED MICROPLASMAS FOR VUV PHOTONS PRODUCTION* - PPT Presentation

Yiting Zhang b Mark Denning a Randall S Urdahl a and Mark J Kushner b a Agilent Laboratories Santa Clara CA USA markdenningagilentcom randallurdahlagilentcom ID: 710398

plasma vuv yzhang science vuv plasma science yzhang iwm7 university michigan amp engr institute pressure torr power sccm flux

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