Ion Beam Lithography: Focused Ion Beam & Ion Projection Lithography - PowerPoint Presentation

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Uploaded On 2018-10-21

Ion Beam Lithography: Focused Ion Beam & Ion Projection Lithography - PPT Presentation

Ziam Ghaznavi CHE 384T Lithography November 30 th 2017 1 OutlineAgenda Motivation Ion Solid Interactions Overview of IBL Systems Future Outlook 2 Motivation SEMATECH and the ITRS ID: 691142

beam ion energy amp ion beam amp energy source lithography electron focused mass sources ibl resists gas exposure interactions

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