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SiGe-on-insulatorinversionlayers:Theroleofstrained-Silayerthicknessone SiGe-on-insulatorinversionlayers:Theroleofstrained-Silayerthicknessone

SiGe-on-insulatorinversionlayers:Theroleofstrained-Silayerthicknessone - PDF document

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Uploaded On 2015-11-03

SiGe-on-insulatorinversionlayers:Theroleofstrained-Silayerthicknessone - PPT Presentation

Electronicmailfgamizugres FIG1SimulatedstrainedSiinversionlayeronSiGeOIsubstrateSilayerSiGelayerthicknessgateoxidethickness5nmburiedoxidethickness80nmAPPLIEDPHYSICSLETTERSVOLUME80NUMBER2 ID: 181521

Electronicmail:fgamiz@ugr.es FIG.1.Simulatedstrained-SiinversionlayeronSiGe-OIsubstrate.Silayer SiGe-layerthickness gateoxidethickness5nm buriedoxidethickness80nm.APPLIEDPHYSICSLETTERSVOLUME80 NUMBER2

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