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Molecular ion sources for semiconductor ion implantation Molecular ion sources for semiconductor ion implantation

Molecular ion sources for semiconductor ion implantation - PowerPoint Presentation

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Uploaded On 2016-11-28

Molecular ion sources for semiconductor ion implantation - PPT Presentation

A  Hershcovitch 1 V I Gushenets 2 D N Seleznev 3 A S Bugaev 2 S Dugin 4 E M Oks 2 T V Kulevoy 3 O Alexeyenko 4 A Kozlov 3 GN Kropachev 3 R P Kuibeda ID: 494538

source ion boron carborane ion source carborane boron beam molecular implantation charge pure operation discharge current phosphorous extracted energy

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