penultimate wafer thermal qual 16012012 1 Massflow 10 gs Setpoint 20C Heaters resistance inlet 1053 1035 1032 1034 1062 outlet 598 589 586 59 604 591 ID: 363042
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Slide1
Frame design-penultimate waferthermal qual.
16/01/2012
1
Massflow
: 10 g/sSetpoint : -20°C
Heaters resistance
inlet
105.3
103.5
103.2
103.4
106.2
outlet
59.8
58.9
58.6
59
60.4
59.1
58.1
inf
58
58.9
inlet
104.7
103.2
102.6
103
105.1
outletSlide2
Frame design-penultimate waferthermal qual.
Total power input
Power transferred to the fluid
Percentage
[W][W]
%0.0001938870
0
11.01892753
11.31235187102.66291222.9541485121.7661219194.8243490633.3758820331.8478405595.42171956
16/01/2012
2Slide3
Frame design-last waferthermal qual.
16/01/2012
3
Massflow
: 10 g/sSetpoint : -20°C
Heaters resistance
inlet
95.7
94.1
93.8
~
95.9
outlet
55.1
54.6
54.3
53.9
5554.253.3~52.353.1inlet9694.59493.294.7outletSlide4
Frame design-last waferthermal qual.
Total power input
Power transferred to the fluid
Percentage[W]
[W]
%0.00
0
11.1
10.1253958891.2363933723.021.0731791391.6218571633.530.7838400991.92849568
16/01/2012
4