optical and wetting effects Aikaterini Argyraki Weifang Lu Paul Michael Petersen Haiyan Ou Department of Photonics Engineering Technical University of Denmark Outline ID: 797230
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Slide1
Scalable nanostructuring on polymer by a SiC stamp: optical and wetting effects
Aikaterini
Argyraki,
Weifang
Lu,
Paul Michael
Petersen,
Haiyan
Ou
Department of
Photonics
Engineering, Technical
University
of
Denmark
Slide2Outline
2
Technical University of Denmark
Aikaterini Argyraki
Motivation
- Wafer-Scale nanostructuring of SiC stamp
- Replication of nanostructures on a polymer surface -Optical effects -Wetting properties Conclusions
Fabrication
Characterization
Slide33
Technical University of Denmark
Aikaterini Argyraki
Motivation
Push performance of
devices
towards
their optimum limits by controlable fabrication of interfaces at the nanoscopic level.Polymer materials gain interest both as semiconductors
and conductors due to their
low cost
.
Slide4PrerequisitesFabrication of nanostructures
that result in macroscale effects
with reproducibility !and….nanopattern definition must be:RapidLow-costApplicable on
wafer scale-high throughput4
Technical University of Denmark
Aikaterini Argyraki
Slide5SiC nanostructuring: summary table
5
Type of
structuresMethodAverage Reflectance (%)
Luminecence enhancement (from 10 to 80 degrees)PeriodicE-beam1,01104%
Semi-periodicSelf-assembly1,62
67%
Periodic Semi-periodic
Technical University of Denmark Aikaterini Argyraki*Reference:Y. Ou, et al., Optics
Express 20, 7, 2012.Y. Ou, et al., Opt
. Lett. 37, 18, 2012.
Slide6A cost
effective
method for SiC
aperiodic nanostructuring
Technical University of Denmark Aikaterini Argyraki
6
Slide7Combinatory masking
200nm
Technical University of Denmark
Aikaterini Argyraki
7
Slide804-06-2013
Ramping
:
RIE
conditions
+
Al thickness
*Reference:A. Argyraki et al., Optical Materials
Express 8(3) 2013.
Slide9Fabrication of different nanotopographies
Color
texture
changes
due to nanostructuring
9
Slide10Optical properties: Reflection, Transmission
Technical University of Denmark
Aikaterini Argyraki
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Average 25%
Average 5%
Average 0,5%
Average 37%
Average 33%Average 13%
Slide11Scalability
Technical University of Denmark
Aikaterini Argyraki
11
Slide12Summary table
12
Type of
structures
MethodAverage Reflectance (%)Luminecence enhancement (from 10 to 80
degrees)PeriodicE-beam
1,01104%Semi-periodic
Self-assembly*1,6267%StochasticCombinatory masking0,50165%
Periodic Semi-periodic Technical University of Denmark Aikaterini Argyraki
Stochastic
*Reference:
Ou, H., Advances in wide bandgap SiC for
optoelectronics, The
European Physical Journal B
Slide13Replication of nanostructures on polymer
Technical University of Denmark
Aikaterini Argyraki
13
Process
flow
Slide14Ni shim: generation
Technical University of Denmark
Aikaterini Argyraki
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Slide15Nanostructured polymer surface
Technical University of Denmark
Aikaterini Argyraki
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Slide16Color textures after nanostructuring on polymer
A
thin
Al
layer (~40nm)
16
Slide17Optical and
wetting
properties after nanostructuring on polymer
68
degrees
123
degrees
Polymer-barePolymer-nano
Al coated-bareAl coated-nano75 degrees132 degreesAverage 11%Average 5%Average 3%
Average 88%Average 85%Average 33%
Slide18ConclusionsDemonstrated 2 inch
wafer
nanostructuring on polymer by a SiC stampColor texture and transmitance
of SiC surface was controled by nanotopography appliedColor texture and reflectance of polymer surface was
significantly altered by nanostructuring and additional deposition of a thin Al layerWetting properties of surfaces shifted after
nanostructuring from hydrophilic to hydrophobic
Technical University of Denmark
Aikaterini Argyraki
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Slide19Acknowledgment
Technical University of Denmark
Aikaterini Argyraki
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Weifang Lu
Yiyu Ou
Paul Michael Petersen
Haiyan Ou
Slide20Thank you
for
your attention
Contact info: aikar@fotonik.dtu.dk
Technical University of Denmark
Aikaterini Argyraki
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