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Thin Solid Films see front matter Elsevier Science B

V All rights reserved PII S00406090 02 004388 Electrical characterization of thin Al O films grown by atomic layer 23 deposition on silicon and various metal substrates MD Groner JW Elam FH Fabreguette SM George aa a ab Department of Chemistry an

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Thin Solid Films see front matter Elsevier Science B






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