PDF-Thin Solid Films see front matter Elsevier Science B
V All rights reserved PII S00406090 02 004388 Electrical characterization of thin Al O films grown by atomic layer 23 deposition on silicon and various metal substrates
Download Presentation
"Thin Solid Films see front matter Elsevier Science B" is the property of its rightful owner. Permission is granted to download and print materials on this website for personal, non-commercial use only, provided you retain all copyright notices. By downloading content from our website, you accept the terms of this agreement.
Presentation Transcript
Transcript not available.