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Physical Interfaces & Carriers Physical Interfaces & Carriers

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Physical Interfaces & Carriers - PPT Presentation

Japan TC Chapter Liaison Report March 30 2017 Ver 01 2 Outline Leadership Current Structure of PIampC Japan TC Chapter Meeting Information Document Review Summary Approved SNARFs Ballots ID: 574445

chapter japan 2016 meeting japan chapter meeting 2016 pic amp semi 2017 task force committee approved meetings conjunction international

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Slide1

Physical Interfaces & CarriersJapan TC Chapter Liaison Report

March 30, 2017

Ver. 0.1Slide2

2Outline

Leadership

Current Structure of PI&C Japan TC Chapter

Meeting Information

Document Review Summary

Approved SNARFs

Ballots

to be reviewed

Task Force

Updates

Other topicSlide3

3Leadership

Committee Co-chairs

Tsuyoshi

Nagashima

(

Miraial

)

Kenji Yamagata (DAIFUKU)

Tsutomu Okabe (TDK)

Step

down as a co-chair at the

last

PIC Japan TC Chapter meeting in December 2016.

Noriyoshi

Toyoda (Hirata Corporation)

Newly appointed by JRSC at the JRSC meeting on August 26, 2016.

Technical Architect

Shoji Komatsu (Acteon NEXT)Slide4

4

Current Structure of Japan TC Chapter

JA Shipping Box TF

Tsuyoshi

Nagashima

(

Mirial

)

Shoji Komatsu (

Acteon NEXT)

Physical Interfaces & Carriers

Japan TC Chapter

Tsuyoshi

Nagashima

(

Miraial

)Kenji Yamagata (Daifuku)Noriyoshi Toyoda (Hirata Corporation)

International 450mm Shipping Box TFTom Quinn (Intel)Shoji Komatsu (Acteon NEXT)

Technical ArchitectShoji Komatsu / Acteon NEXT

Fiducial Mark Interoperability TF

I&C Committee: M. Matsuda (Hitachi Kokusai Electric)PI&C Committee: S. Mashiro (Tokyo Electron)Silicon Wafer Committee: T. Nakai (SUMCO)Packaging Committee: S. Masuchi (DISCO)Traceability Committee: H. Tsunobuchi (KEYENCE)

Under Silicon Wafer Japan TC Chapter

Global PIC Maintenance TF

Larry

Hartsough (U.A. Associates)Shoji Komatsu (Acteon NEXT)

International 450 mm PI&C TFMelvin Jung (Intel)Shoji Komatsu (Acteon NEXT)

International Reticle SMIF Podand Lord Port Interoperability TFJan Rothe (GLOBALFOUNDRIES)

International Activities

TF under PIC Japan TC Chapter was discharged

Newly appointed

Tsutomu Okabe (TDK)

stepped down

from co-chair.Slide5

5Meeting Information

Last meeting

Japan Winter

2016 Meetings in conjunction with SEMICON Japan 2016

Wednesday, December 14, 2016

14:00-17:00

@Tokyo Big Sight Conference Tower, Tokyo

Next meeting

Japan Spring 2017 MeetingsWednesday, April 19, 2017 13:30-17:00@SEMI Japan office, TokyoSlide6

6

Document Review Summary at Japan Winter 2016

Meetings

in conjunction with SEMICON Japan 2016

NoneSlide7

7Approved

SNARF at Japan Winter 2016 Meetings in conjunction with SEMICON Japan 2016

Doc #

Description

TF

6130

Reapproval

of SEMI

E84-1109,

SPECIFICATION FOR ENHANCED CARRIER

HANDOFF PARALLEL

I/O

INTERFACE”

Global PIC Maintenance TF Slide8

8Ballots to be reviewed at Japan

Spring 2017 Meetings

8

Cycle

1

- 2017

Doc #

Description

TF

6130

Reapproval

of SEMI E84-1109,

“SPECIFICATION FOR ENHANCED CARRIER HANDOFF PARALLEL I/O INTERFACE”

Global PIC Maintenance TF Slide9

9q

Task Force Updates [1/3]

Fiducial Mark Interoperability TF

Last TF meeting was held on November 18, 2015

T7 issues

#5890

Delete all position specifications from SEMI T7 because position specifications are also described on SEMI M1 and other related Silicon Standard.

The ballot passed with

editorial changes at the

Traceability Japan TC Chapter meeting on Dec. 18, 2015

and published as T7-0516. Disbandment of this TFTF leaders decided to propose disbanding this TF to each technical committee

If this proposal is agreed by all Japan TC Chapters of Assembly & Packaging, I&C, PIC, Silicon Wafers and Traceability,

then the TF will be discharged. Silicon Wafers Japan TC Chapter and Assembly & Packaging Japan TC Chapter agreed in March 2017 respectively.To be proposed at the next Japan TC Chapter meeting of PIC, I&C and Traceability TCs respectively. Backend alignment issues with introducing fiducial mark wafer is left. Would be discussed in Assembly & Packaging Japan TC Chapter after its disbandment.Slide10

10Task Force Updates [

2/3]

Global PIC Standards Maintenance Task Force (JA Side)

#6130,

Reapproval

of SEMI

E84-1109, “SPECIFICATION FOR ENHANCED CARRIER HANDOFF PARALLEL I/O INTERFACE”

SNARF was approved at the PIC Japan TC Chapter meeting on December 14, 2016

Ballot was submitted for Cycle

1-2017Rejects and comments to be reviewed at the TF meeting during NA Standards Spring 2017 Meetings Ballot results to be

reviewed at the PIC Japan TC Chapter meeting on April 19, 2017. Slide11

11Task Force Updates [

3/3]

International 450 mm Physical Interfaces & Carriers Task Force (JA Side)

#

5974: New Auxiliary Information: “450mm PIC INTEROPERABILITY”

SNARF

was approved

at the Japan TC Chapter meeting on December 16 in conjunction with

2015

The publication for this AUX was approved by the PIC Japan TC Chapter at the TC Chapter meeting on December 14, 2016 and would be forwarded to GCS and A&R for subsequent approval. However, Safety Check and IP Check were not done at this TC Chapter meeting on this approval procedure, so these checks to be done at the next PIC Japan TC Chapter meeting on April 19, 2017.  Slide12

12Other topic

Proposal of New Standards, Specification for Lamella Carriers Used in Transmission Electron Microscopes

According to the decision at the EU TC Chapter meeting in October during SEMICON Europa 2016, the meeting to introduce proposal was held on December 13 at SEMI Japan Office in conjunction with SEMICON Japan 2016

Back ground of this standardization

Presentation on “Enabling HVM TEM metrology support - standards for TEM lamella carriers”

Proposed drafts of SNARF and TFOF

The

Japan TC Chapter agreed to support for conducting a survey regarding standardization of TEM and potential further standardization of TEM grid carrier.

SEMI

HQ will conduct this survey. Currently contents of survey form is under drafting.Slide13

Thank You!

For more information or participate in any Japan PI&C activities,

please

contact Chie Yanagisawa at SEMI Japan

(cyanagisawa@semi.org)Slide14

Backup14Slide15

155 Year Review

SEMI E84-1109

The

Global PIC Standards Maintenance TF

will

discuss what to do for SEMI E84-1109 and then propose any action at the next Japan TC Chapter meeting in conjunction with SEMICON Japan 2016.

SEMI E23-1104 (Reapproved 0710)

The TC Chapter did not decide any further support action to

this standard and

let it go inactive. Slide16

16Task Force Updates [4/4]

International Process Module Physical Interface (IPPI) TF

The document worked by this task force was published.

The disbandment of IPPI TF was approved, with pending the EU TC Chapter’s agreement, at the Japan TC Chapter meeting on April 15, 2015.

NA TC Chapter approved the disbandment of IPPI TF at the NA PIC TC Chapter meeting in conjunction with NA Standards Spring 2016 Meetings, so that the disbandment of this TF was completed.