FIB system Oxford EBSD system
EDS system Sample Loading STEM detector Stage Rotation 360 o Tilt 70 o BS detector V kV depth um A Density gcm3 Z 1 000818 10642 119 46 2 00260 5 0120 10 0382 12
electron beamdetectorelectronsbeamelectronsamplesurfaceenergylenssecondaryatomssystemfibbsescatterednumber
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