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Microstructural characterization of sputterdeposited Pt thin film electrode JiEun Lim Jae Kyeong Jeong Kun Ho Ahn Hyeong Joon Kim and Cheol Seong Hw ang a School of Materials Science and Engineering

The Pt films show ed a strong 111preferred texture irrespective of the thickness underla yer and growth temperature The authors previously reported JE Lim DY Park JK J eong G Darlinski HJ Kim and CS Hwang Appl Phys Lett 81 3224 2002 that the films w

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Microstructural characterization of sputterdeposited Pt thin film electrode JiEun Lim Jae Kyeong Jeong Kun Ho Ahn Hyeong Joon Kim and Cheol Seong Hw ang a School of Materials Science and Engineering






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