7th International Electronic Conference on Sensors and Applications Steffen Hadeler Sebastian Bengsch Maren S Prediger Marc Christopher Wurz Institute of Micro Production Technology ID: 932299
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Slide1
Transfer Printing of Conductive Thin-Films on PDMS with Soluble Substrates for Flexible Biosensors
7th
International Electronic Conference on Sensors and
Applications
Steffen Hadeler,
Sebastian Bengsch, Maren S. Prediger, Marc Christopher Wurz
Slide2Institute
of Micro Production TechnologyPZH - Hannover Centre for Production TechnologyLeibniz University Hannover, Lower Saxony, Germany
Introduction
IntroductionState of the artManufacturing ProcessMethodsConclusionOutlook
Slide3Various sensors in medical technology have conductive
structuresIn this thesis: Focus on electrocorticography (ECOG)Invasive, Highly sensitiveMeasurement of
brain functions
Applications of ECoG:treatment of diseases like epilepsyBrain-Computer-InterfaceState of the art I IntroductionState of
the artManufacturing Process
MethodsConclusionOutlook
Slide4Commercial
ECoG Electrodesplatinum wire and plates in PDMSAdvantage: the
long-term clinical experience
Disadvantage: rigidity, limited resolutionPublished ECoG Electrodesphotolithography and physical vapour deposition (PVD)on polyimide
Advantage: high resolutionDisadvantage: complex production in clean
roomState of the art II
IntroductionState of the artManufacturing ProcessMethodsConclusionOutlook
[2]
[1]
Slide5C
ombine the advantages of the above methods Clinical long-term experience PDMSincrease resolution
reduction of electrode spacing
Manufacturing ProcessIntroductionState of the artManufacturing ProcessMethods
ConclusionOutlook
Slide6Evaluation
of the developed manufacturing processMaterial characterizationAdhesion FlexibilityElectrical characterization
ConductivityImpedance Measurement
Demonstrator systemMethodsIntroductionState of the artManufacturing Process
MethodsConclusionOutlook
Slide7Adhesion
cross cut test according to DIN EN ISO 2409platinum and gold
Platium poor adhesion
Gold better adhesionFlexibilityTensile test according to to DIN 53504 Different layer heights
Silicatization with NanoFlame
Material characterization
IntroductionState of the artManufacturing ProcessMethodsConclusionOutlook
Slide8Conductivity
Four-point measurementBefore Transfer (
red)
After Transfer (grey)Different layer heightsElectrical characterization IIntroduction
State of the art
Manufacturing ProcessMethodsConclusion
Outlook
Slide9Electrochemical
impedance measurementAs described in Nahvi et al. [3]
Sodium
chloride solution (9 mg/l)LCR meter HM9119 (Hameg Instruments GmbH)Electrode with 2 contacts, 1x1 mm
Electrical characterization II
IntroductionState of the
artManufacturing ProcessMethodsConclusionOutlook [3]
Slide10Design
of an ECoG electrode array8 electrode contacts 1x1 mm²Supply lines 0,25 mm
isolated with PDMS
Design of a three-dimensional electrodeAdditive production of different casting mouldsDemonstrator systemIntroductionState of the art
Manufacturing ProcessMethodsConclusion
Outlook
Slide11New
manufacturing process developedHigh resolution through thin film technologyUse of PDMS
Various studies for
optimizationAdhesionFlexibilityConductanceDesign of a demonstratortwo-dimensional three-dimensionalConclusionIntroduction
State of the
artManufacturing ProcessMethods
ConclusionOutlook
Slide12Improvement
of the PVD processhigher resolution maskingMore electrode contactsRoll-
to-roll processthree-dimensional manufacturing
Better additive manufacturingpatient individual electrodesAdaptation for other implants and biosensorsOutlookIntroductionState of the
artManufacturing Process
MethodsConclusionOutlook
Slide13Thank you for your attention
hadeler@impt.uni-hannover.de
Slide14[1]
PMT Corporation: Cortac Grids & Strips. http://www.pmtcorp.com/cortac.html. Version: 06.05.2019[2] Rubehn, Birthe ; Bosman, Conrado ; Oostenveld, Robert ; Fries, Pascal ; Stieglitz,
Thomas: A MEMS-based flexible multichannel ECoG-electrode array. In: Journal of neural
engineering 6 (2009), Nr. 3, S. 036003. [3] Nahvi, Mohammad S. ; Boroumand, Farhad A. ; Maghami, Mohammad H. ; Sodagar, Amir M. ; Shojaei, Amir ; Mirnajafi-Zadeh, Javad: Design, fabrication, and test of flexible thin-film microelectrode arrays for neural interfaces. 2017 IEEE 30th Canadian Conference on Electrical and Computer Engineering
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