Nano electro mechanical systems (

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Nano electro mechanical systems (




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Slide1

Nano electro mechanical systems (nems)

Slide2

What is NEMS?The term

Nanoelectromechanical

systems

or NEMS is used to describe devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the logical next miniaturization step from so-called microelectromechanical systems, or MEMS devices.

Slide3

NEMS - DefinitionNEMS is the integration of sensors, actuators, electronics, photonics, energy, fluidics, chemistry, and biology into a meaningful system enabled by sub micrometer science and engineering precision.

Slide4

Nanowires

Nanowires

such as

nanoLED arrays might enable a new class of nanodisplays.But consider fabricating nanowires out of dissimilar materials such as gallium arsenic on silicon. The ability to realize vertical

nanowires

composed of metals, semiconductors, and insulators on silicon and other substrates will enable new types of high performance, heterogeneous micro- and

nanosystems

.

And they can be formed without the usual considerations of lattice strain matching that occurs in

microscale dimensions.

Slide5

Nanowires

Slide6

NEMS in Nano Biotechnology

NEMS will also enable other important new opportunities in the emerging field of

nanobiotechnology

. The ultrasensitive detection method could replace complicated optical fluorophore tags and optical readout methods routinely used by molecular biologists with a simple electrically measured parameter—frequency.

A

biocantilever

diving board fabricated by Professor Michael

Roukes

at

CalTech has shown the ability to detect small mass changes as low as 7 zeptograms, which is roughly the mass of a single protein molecule!

Slide7

Nanoassembly

The

most important area of NEMS opportunity arises— programmable self-assembly for heterogeneous

nanointegration. It is simply called as nanoassembly––a new manufacturing paradigm that allows for the directed self-assembly of components into precise locations on a substrate.

Nanoassembly

might also be used to build systems on non-planar or 3D surfaces where traditional monolithic integration has failed.

Slide8

Approaches to miniaturization

Two complementary approaches to fabrication of NEMS systems can be found.

The

top-down approach The bottom-up approach

Slide9

Top-down approachThe top-down approach uses the traditional

microfabrication

methods, i.e. optical and electron beam lithography, to manufacture devices.

Typically, devices are fabricated from metallic thin films or etched semiconductor layers.

Slide10

Bottom-up approach

Bottom-up approaches, in contrast, use the chemical properties of single molecules to cause single-molecule components to

(a) self-organize or self-assemble into some useful conformation, or

(b) rely on positional assemblyThis allows fabrication of much smaller structures, albeit often at the cost of limited control of the fabrication process.

Slide11

Future of NEMSNEMS devices, if implemented into everyday technologies, could further reduce the size of modern devices and allow for better performing sensors.

Carbon

based materials have served as prime materials for NEMS use, because of their highlighted mechanical and electrical properties.

Slide12

ConclusionIn summary, the MEMS revolution that began at DARPA in the early 1990s will continue to bring new and more powerful

microsystems

to the commercial world and defense community.

Therefore, there is no doubt that the Age of NEMS will produce exciting new capabilities we are only now beginning to imagine.

Slide13

Thank You!!!

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