Nano electro mechanical systems (
Presentations text content in Nano electro mechanical systems (
Nano electro mechanical systems (nems)Slide2
What is NEMS?The term
or NEMS is used to describe devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the logical next miniaturization step from so-called microelectromechanical systems, or MEMS devices.Slide3
NEMS - DefinitionNEMS is the integration of sensors, actuators, electronics, photonics, energy, fluidics, chemistry, and biology into a meaningful system enabled by sub micrometer science and engineering precision.Slide4
nanoLED arrays might enable a new class of nanodisplays.But consider fabricating nanowires out of dissimilar materials such as gallium arsenic on silicon. The ability to realize vertical
composed of metals, semiconductors, and insulators on silicon and other substrates will enable new types of high performance, heterogeneous micro- and
And they can be formed without the usual considerations of lattice strain matching that occurs in
NEMS in Nano Biotechnology
NEMS will also enable other important new opportunities in the emerging field of
. The ultrasensitive detection method could replace complicated optical fluorophore tags and optical readout methods routinely used by molecular biologists with a simple electrically measured parameter—frequency.
diving board fabricated by Professor Michael
CalTech has shown the ability to detect small mass changes as low as 7 zeptograms, which is roughly the mass of a single protein molecule!Slide7
most important area of NEMS opportunity arises— programmable self-assembly for heterogeneous
nanointegration. It is simply called as nanoassembly––a new manufacturing paradigm that allows for the directed self-assembly of components into precise locations on a substrate.
might also be used to build systems on non-planar or 3D surfaces where traditional monolithic integration has failed.Slide8
Approaches to miniaturization
Two complementary approaches to fabrication of NEMS systems can be found.
top-down approach The bottom-up approachSlide9
Top-down approachThe top-down approach uses the traditional
methods, i.e. optical and electron beam lithography, to manufacture devices.
Typically, devices are fabricated from metallic thin films or etched semiconductor layers.Slide10
Bottom-up approaches, in contrast, use the chemical properties of single molecules to cause single-molecule components to
(a) self-organize or self-assemble into some useful conformation, or
(b) rely on positional assemblyThis allows fabrication of much smaller structures, albeit often at the cost of limited control of the fabrication process.Slide11
Future of NEMSNEMS devices, if implemented into everyday technologies, could further reduce the size of modern devices and allow for better performing sensors.
based materials have served as prime materials for NEMS use, because of their highlighted mechanical and electrical properties.Slide12
ConclusionIn summary, the MEMS revolution that began at DARPA in the early 1990s will continue to bring new and more powerful
to the commercial world and defense community.
Therefore, there is no doubt that the Age of NEMS will produce exciting new capabilities we are only now beginning to imagine.Slide13