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Electron-beam lithography Electron-beam lithography

Electron-beam lithography - PowerPoint Presentation

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Uploaded On 2018-03-08

Electron-beam lithography - PPT Presentation

with the Raith EBPG Part 4 Alignment Marks M Rooks Yale University Alignment Marks Alignment marks or markers are used to align one layer of lithography with another layer For example if you need to print small thin wires that connect to large thick pads then you will need al ID: 643613

marks alignment wafer chip alignment marks chip wafer measure mark find ebpg amp move deflect beam aluminum field thin

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