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Electron-beam lithography Electron-beam lithography

Electron-beam lithography - PowerPoint Presentation

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Uploaded On 2019-01-27

Electron-beam lithography - PPT Presentation

with the Raith EBPG Part 1 Introduction M Rooks Yale University The EBPG has a long history stretching back to the 1960s This particular ebeam system was first built by Philips in the Netherlands then was bought out by Cambridge Instruments UK which morphed into Leica Lithography ID: 748469

beam resist pmma electrons resist beam electrons pmma substrate pattern hsq features dose film zep sem proximity metal water

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