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Electron-beam lithography Electron-beam lithography

Electron-beam lithography - PowerPoint Presentation

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Uploaded On 2018-03-07

Electron-beam lithography - PPT Presentation

with the Raith EBPG Part 3 Hardware M Rooks Yale University EBPG 5000 System Hardware 100 kV accelerating potential electrons of course 20 bit main field DAC Digital to Analog Converter ID: 641707

substrate beam piece field beam substrate field piece stage laser focus ebpg exposure height pattern wafer spot sample work

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