PPT-Nanoscale Lithography, Techniques and Technology

EE 4611 Dehua liu 482016 THE origin of Nanoscale Lithography Major methods of Nanoscale Lithography A dvantages and disadvantages of different methods of Nanoscale Lithography Moores . Macro and . Nanoscales. Thomas Prevenslik. QED Radiations. Discovery Bay, Hong Kong. 1. ASME 4th Micro/Nanoscale Heat Transfer Conf. (MNHMT-13), Hong Kong, Dec. 11-14, 2013. The . Fourier law . is commonly used to determine the . NANO 101. Introduction to Nanotechnology. 1. 2. Lithography. Photolithography. Electron beam lithography. X-ray lithography. Focused ion beam lithography. “Photoengraving”. Transfer pattern into reactive polymer film (“resist”). Sponsored by. CBM. 2. and CHANL. Agenda. DAY 1 (Chapman 125 – UNC Campus). 7:30 am – 8:00 am Registration. 8:00 am – 12:00 pm Patterning structures across different length scales. General Overview and Introduction (. . kjetil. Lithography is the process of transferring patterns. Photolithography. Positive resist. Negative resist. X-ray lithography. E-beam lithography. Photolithography. General process: . Cleaning of wafer. “Nanoscale . probing of image dipole interactions in a metallic nanostructure. ," C. . Ropp. , Z. Cummins, S. Nah, J.T. . Fourkas. , B. Shapiro, E. . Waks. , Nature Communications, 6, 6558 (. 2015). Ziam Ghaznavi. CHE 384T Lithography. November 30. th. , 2017. 1. Outline/Agenda. Motivation. Ion – Solid Interactions. Overview of IBL Systems . Future Outlook. 2. Motivation. SEMATECH and the ITRS. Ziam Ghaznavi. CHE 384T Lithography. November 30. th. , 2017. 1. Outline/Agenda. Motivation. Ion – Solid Interactions. Overview of IBL Systems . Future Outlook. 2. Motivation. SEMATECH and the ITRS. Xiaodong. Yang,. October 25, 2011. The iridescence of . Morpho. . butterfly. Photonic crystals. Surface plasmons. Metamaterials. Reference pictures resources: internet. The scale of things. The electromagnetic spectrum. Introduction.. Photon-based lithography: DUV (deep UV), EUV (extreme UV), X-ray. Charged-beam based lithography: electron beam, focused ion beam. Nanofabrication by molding/printing: soft lithography, nanoimprint. Electron Beam Lithography System HS50 By: Bitew Dinke Hugo Ferrer Enee416 Dr. G hodssi Definition of LIGA  LIGA is a German acronym that stands for Litho g raphie , Galvano f ormung and Ab f ormung .  When translated it me Building 440 Phone: 630 - 252 - 1775 Fax: 630 - 252 - 5739 E - mail: yuziliu @anl.gov Argonne National Laboratory 9700 S Cass Ave., Argonne, IL 60439 YUZI LIU Scientist Electron & X - Ray Microscop Big Things from a Tiny WorldThink small Think really really small151smaller than anything you ever saw through a conventional microscope at school Think atoms and molecules and now you146re there You1 The Benefits of Reading Books,Most people read to read and the benefits of reading are surplus. But what are the benefits of reading. Keep reading to find out how reading will help you and may even add years to your life!.The Benefits of Reading Books,What are the benefits of reading you ask? Down below we have listed some of the most common benefits and ones that you will definitely enjoy along with the new adventures provided by the novel you choose to read.,Exercise the Brain by Reading .When you read, your brain gets a workout. You have to remember the various characters, settings, plots and retain that information throughout the book. Your brain is doing a lot of work and you don’t even realize it. Which makes it the perfect exercise!