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MICROMACHINING Refers to techniques for fabrication MICROMACHINING Refers to techniques for fabrication

MICROMACHINING Refers to techniques for fabrication - PowerPoint Presentation

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Uploaded On 2018-09-22

MICROMACHINING Refers to techniques for fabrication - PPT Presentation

of 3D structures on the micrometer scale Most methods use silicon as substrate material Some of process involved in this are photolithography etching bulk machining laser machining etc Unit metal removal rate and equipment precision are key factors to micro machining ID: 675329

laser etching machining high etching laser high machining surface substrate photoresist silicon wafer wet micromachining process material micro produces

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