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Surface micromachining  and Process flow part 1 Surface micromachining  and Process flow part 1

Surface micromachining and Process flow part 1 - PowerPoint Presentation

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Uploaded On 2019-01-28

Surface micromachining and Process flow part 1 - PPT Presentation

Identify the basic steps of a generic surface micromachining process Identify the critical requirements needed to create a MEMS using surface micromachining List common structural materialsacrificial materialetchant combinations used in ID: 748558

etch process flow mask process etch mask flow wafer steps material surface oxide backside nitride order step photoresist micromachining

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