By Adam Schmolling April 29 2016 Abstract The semiconductor industry uses a number of harmful chemicals This presentation covers the handling of these chemicals This presentation will ID: 560023
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Slide1
Handling and Remediation of Toxic Materials
By Adam SchmollingApril 29, 2016
Abstract: The semiconductor industry uses a number of harmful chemicals.
This presentation covers the handling of these chemicals. Slide2
This presentation will:
Introduce the chemicals, and what they do to humans.Outline how these chemicals are used in the semiconductor manufacturing process.
Explain how manufacturers are handling these chemicals.
Cover environmental issues in third world countries.
Address what manufacturers are considering to further clean up the semiconductor manufacturing process. Slide3
Some of the harmful chemicals used:
Acetone
Arsenic
Arsine
Benzene
Cadmium
Methyl Chloroform PhosphineToluene TrichloroethyleneSlide4
Acetone
An industrial solvent.Used in the polishing of silicon wafers.
OHSA PEL: 500 ppm
OSHA STEL: 750 ppm
OSHA CEILING: (immediate danger) 3000 ppm Slide5
Arsenic
Used in rat poison.Used as a dopant in semiconductors.
OSHA PEL: 10 micro grams / m
3Slide6
Arsine
Gas made with ArsenicUsed for vapor deposition
In route through inhalation
Garlic / fishy smell,
which does not provide enough warning
Flammable and highly toxicOSHA PEL: 0.05 ppmSlide7
Benzene
Used in photo-electrochemical etchingHas the famous Benzene ring
Sweet aromatic odor
Used extensively in assorted industries
Liquid at room temperature, but
evaporates into air quickly.
Slide8
Cadmium
Used as a dopantBanned by EUCauses a number of ailmentsSlide9
Methyl Chloroform
Used in washing of silicon wafersOSHA PEL: 350 ppm
OSHA STEL: 450 ppm (for 15 minutes)
Immediate danger: 700 ppmSlide10
Phosphine
Used in vapor depositionFlammable, toxic and Pyrophoric
Immediate danger limit: 0.3 ppmSlide11
Toluene
Used for chemical vapor depositionSweet, pungent odor, which provides
Enough warning.
OSHA PEL: 200 ppm
OSHA ST: 500ppm (for 10 minutes)
Gas at room temperatureSlide12
Trichloroethylene
Used for wafer washingLiquid at room temperature
May decay into Dichloroacetylene,
which
is explosive and a neurotoxin
.
OSHA PEL: 100 ppm Slide13
Assorted Acids
Hydrofluoric AcidSulfuric Acid
Nitric Acid
Orthophosphoric
Acid
Hydrochloric Acid
Hydrobromic AcidSlide14
Silane
Used in chemical vapor depositionSilane
leaks can be very dangerous
Spontaneously ignites when mixed
with air (without flame or spark.)Slide15
PyrotechnicsSlide16
PyrotechnicsSlide17
PyrotechnicsSlide18
Residue
Leaves a brown residue
which is composed of SiH
2
O
and a white residue composed of SiO2
Slide19
Silane
explosions in the semiconductor industry1976, Germany
1989, Japan
1990, Japan
1992, United States
1996, Japan
2003, United States2005, Taiwan Slide20
Chemical Handling Concerns
1981: Leaky underground storage tanks in San Jose, CA.
In 1990, 70 female workers in Scotland brought a lawsuit against National Semiconductors.
1995
:
The American Journal of Independent Medicine studied miscarriage among semiconductor industry workers.
1996: IBM employees brought a lawsuit against various chemical manufacturers.2014: Samsung publically apologized for worker deaths. Slide21
Samsung Worker Deaths and Illnesses in Korea Slide22
Handling of Dangerous Wastes
There is a three part strategy for dealing with the waste chemicals of semiconductor manufacturing:
1. Waste Elimination
2. Waste Reduction
3. Waste TreatmentSlide23
Gas Monitoring
PPM detectors in ventilation, gas cabinets, enclosures etc.Flammable gas monitoring
Containers of hazardous gasses are isolatedSlide24
State of the Art Gas Monitoring SystemSlide25
ActuallySlide26
Plant Exhaust SystemSlide27
Making things “Green”
Fairchild Semiconductors is striving to become more environmentally friendly. Texas Instruments is very proud of their LEED certified fabrication plant in Richardson, Texas. Slide28
PPM Limits (Per
Product)Slide29
PPM Limits ContinuedSlide30
Ultra Pure Water (UPW) is used
It takes 1600 gallons of tap water to make 1000 gallons of UPWIt takes 1500 gallons of UPW to create a single 30cm waferA typical fabrication plant can use 4 million gallons of UPW water per day.
Water UseSlide31
Water Use
This is an environmental, as well as an economic concern.Especially in China, who is a leader of semiconductor manufacturing, and also has a growing thirst for clean water.
Sometimes environmental regulations are skirted. Slide32
Conclusion
The semiconductor industry uses a number of dangerous chemicals. These chemicals must be carefully handled, and care must be taken to avoid contaminating the environment or endangering workers. Slide33
References
[1
]
electronicstakeback.com
[online]
Available: http://
www.electronicstakeback.com
/toxics
- in- electronics/
wheres
-the
-harm
-component
/
[2]
electronicstakeback.com
[online]
Available: http://
www.electronicstakeback.com
/2014/05/27/
samsung
- apologizes
-to-semiconductor-workers-who-contracted-cancer-promises
- compensation
/
[2]
chinawaterrisk.org
[online]
Available:
http
://
chinawaterrisk.org
/resources/analysis-reviews/8
- things
-you-should-know-about-water-and-semiconductors
/
[3]
prevor.com
[online]
Available: http://
www.prevor.com
/en/chemical-risks-in
- semiconductors
-
industrySlide34
References
[5]
cnx.org
[online]
Available: http://
cnx.org
/contents/7238FjUe@3
/The
-Environmental- Impact-of-
th
[6]
semi.org
[online]
Available: http://semi.org/en/ti%E2%80%99s
- %
E2%80%9Cgreen-
fab %
E2%80%9D-cost-30-less
-%
E2%80%94
- and
-will-save-4-million-year-
0
[7]
controlinstruments.com
[online]
Available: http://www.controlinstruments.com
/ documents
/hazardous
- gas
-monitoring-throughout
-semiconductor
-manufacturing-
facility
[8] S.
Virgil, “Environmental Management of Wastes in the Semiconductor and
Electronics Industries,” Proceedings of International Symposium on Advanced Waste and Emission Management. Dec. 4, 2000
pp
2-7Slide35
Five Key Points
Silane and
Phosphane
need no spark to ignite, but can spontaneously ignite when exposed to the atmosphere.
If safety standards are skirted, workers can end up with Leukemia, liver problems, and a host of other long term ailments.
The semiconductor industry currently consumes large quantities of water. Ways to reduce water consumption are continuously being investigated.
The three level strategy to reducing dangerous waste is elimination, reduction, and treatment.
Infinitesimally small amounts (0.05 – 0.3 ppm) of Arsine and Phosphine are lethal.