PDF-J.Micromech.Microeng.(2012)074004AAydemirandTAkin

Author : liane-varnes | Published Date : 2015-10-06

Ti Photoresist Cr Si Cr Ti Si Photoresist Si A Figure1SchematiccrosssectionaldrawingofthestructurebeforedryAuetchprocessisperformed Figure2CrosssectionalSEMimagesoftheplasma

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J.Micromech.Microeng.(2012)074004AAydemirandTAkin: Transcript

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