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MEMS for  NEMS Solutions for the Fat Finger Problem MEMS for  NEMS Solutions for the Fat Finger Problem

MEMS for NEMS Solutions for the Fat Finger Problem - PowerPoint Presentation

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MEMS for NEMS Solutions for the Fat Finger Problem - PPT Presentation

Michael Kraft Overview The Fat Finger Problem Manipulating Atoms Manipulating Ions Manipulating Larger O bjects Probing Material at the Nanoscale Conclusions The Fat Finger Problem Macroscopic tools are often unsuitable for ID: 630494

chips atom trap micro atom chips micro trap atoms mems bonding probe ion alignment material manipulation ions integrated trapping

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Slide1

MEMS for NEMSSolutions for the Fat Finger Problem

Michael KraftSlide2

Overview

The Fat Finger ProblemManipulating Atoms

Manipulating Ions

Manipulating Larger O

bjects

Probing Material at the

Nanoscale

ConclusionsSlide3

The Fat Finger Problem

Macroscopic tools are often unsuitable for

nanoscale

manipulation

MEMS can provide a suitable solution

There is only 1-2 orders of scale difference

Nanofabrication can be integrated

with

MEMS fabrication

Richard E. Smalley, “Of chemistry, love, and

nanobots

,”

Scientific American

285

(

September 2001):76-77.Slide4

Integrated Micro-Chips for manipulation and trapping of atoms Quantum lab-on-a-chip

Basic ResearchQuantum-behaviour

Entanglement, coupling

Low dimensional physics

Atom Chips

New devices – precise sensors

Atom interferometer

Atomic clocks

Inertial sensors

Quantum information processing

Quantum computersSlide5

Gold Wires for Magnetic

Confinement of Atoms

Current through gold wires sets up a magnetic confinement field as a track for ultra cold atoms or atom clouds

Fabrication process: Au-electroplating or ion beam milling

Enables atom interferometry on a chipSlide6

Atom Interferometer on a Chip

23mm

Extremely high sensitivity for

EM-fields, gravitySlide7

Micro-Cavities

KOH etched inverted pyramids surrounded by current Au-wires

Cavities: inverted pyramids or semi-spherical

Magneto-optic cooling of atoms

Optical resonators with high finesse for single atom detection

RMS Roughness [nm]

0 5

0

20 40

Etch duration [min

]

Very smooth cavitiesSlide8

3D Electrostatic Actuator

XY-motion

Alignment of the optical cavity with fibre

Correction von bonding misalignment

Z-motion

Tunable

optical cavity

Distance [um]

0 2 4

0

50 100

Voltage [V]Slide9

Nan0

Alignment

Bonding

Demonstrated 200nm alignment bonding at chip

level (2cm x 2cm)

Only 10% of wafer area required for self-engaging structures

Wafer surface smooth enough for thermo-compression bonding

self-engaging alignment concept

using cantilevers

SEM image of aligned and

bonded chips

Vernier

structures to evaluate

bonding alignment

IR image of a bonded sample

2.3mm

‘LEGO on a chip’Slide10

Integrated chips for manipulation and trapping of ions or charged particlesRF Paul Trap

Applications similar to Atom Chips(Semi-) Planar Paul TrapsCompatible with

microfabrication technology

Ion ChipsSlide11

Ion

Traps

With Shielded Dielectric

Field simulation

Y-Shaped Trap

SEM Picture

Wet etching 50/500nm Cr-Au

DRIE 30um Si device layer

O

vercome

the problem of

exposed

dielectrics

impeding the stability of

trap

R

etain

the simplicity of fabrication Slide12

The trap is well suited for trapping large array of single ions and perform quantum simulations2D ion trap arrays comprises of an RF metal above a grounded plane electrode

Ion

2D Lattice TrapSlide13

Micro-Particle Injection System

für Laser Applications

Micro-particle

i

njection for Laser chambers

s

econdary radiation for medical applications, material testing,

etc

Electrostatic MEMS „rail gun“ (linear electrostatic motor)Slide14

Electro-magnetic Levitation

Electromagnetic Levitation System and

RailgunSlide15
Slide16
Slide17
Slide18

Bio-sensing

Probe Application

Arthroscopic AFM sensor probe technology

Cartilage

health monitoring and analysis

Uses micro and

nano

-indentation approach to characterise tissue stiffness

[Ref: Stolz, et al., Nature Nanotechnology, 2009]

Ref: M. Stolz, J. Biophys., Vol 88, 2731-2740, 2010

Probes interaction with cartilage fibres using (A) micro-sphere probe tip and (B)

nano

sharp tip.

M. Stolz, Biophysical J., 98, 2010.Slide19

2 µm

Early

Concept

and Prototype

Sharp AFM cantilever tip to improve indentation resolution (Tip radius 20nm -10nm)

Multiple probes for large area sensing

Robust design to withstand operation stress

Integrated readout with capacitance or

piezoresistance

information

Self actuation AFM probe sensor design based on capacitive/

piezoresistive

readout

SEMs

of AFM prototype device fabricated on SOI material

Readout structures

Cantilevers

Probe tips

Cantilever length 500µm, 80µm & 3µm thick. Freq. = 40 kHz & k = 5.5 N/m.Slide20

Conclusions

MEMS can provide a toolkit for

nanoscale

manipulation of

nano

-sized objects.

These include trapping, detecting and shuffling of ions and atoms,

moving around small objects contactless,

a

nd probing material, including biological tissue, at the nanoscale

.There are many other examples.Slide21

Thank you!