Michael Kraft Overview The Fat Finger Problem Manipulating Atoms Manipulating Ions Manipulating Larger O bjects Probing Material at the Nanoscale Conclusions The Fat Finger Problem Macroscopic tools are often unsuitable for ID: 630494
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Slide1
MEMS for NEMSSolutions for the Fat Finger Problem
Michael KraftSlide2
Overview
The Fat Finger ProblemManipulating Atoms
Manipulating Ions
Manipulating Larger O
bjects
Probing Material at the
Nanoscale
ConclusionsSlide3
The Fat Finger Problem
Macroscopic tools are often unsuitable for
nanoscale
manipulation
MEMS can provide a suitable solution
There is only 1-2 orders of scale difference
Nanofabrication can be integrated
with
MEMS fabrication
Richard E. Smalley, “Of chemistry, love, and
nanobots
,”
Scientific American
285
(
September 2001):76-77.Slide4
Integrated Micro-Chips for manipulation and trapping of atoms Quantum lab-on-a-chip
Basic ResearchQuantum-behaviour
Entanglement, coupling
Low dimensional physics
Atom Chips
New devices – precise sensors
Atom interferometer
Atomic clocks
Inertial sensors
Quantum information processing
Quantum computersSlide5
Gold Wires for Magnetic
Confinement of Atoms
Current through gold wires sets up a magnetic confinement field as a track for ultra cold atoms or atom clouds
Fabrication process: Au-electroplating or ion beam milling
Enables atom interferometry on a chipSlide6
Atom Interferometer on a Chip
23mm
Extremely high sensitivity for
EM-fields, gravitySlide7
Micro-Cavities
KOH etched inverted pyramids surrounded by current Au-wires
Cavities: inverted pyramids or semi-spherical
Magneto-optic cooling of atoms
Optical resonators with high finesse for single atom detection
RMS Roughness [nm]
0 5
0
20 40
Etch duration [min
]
Very smooth cavitiesSlide8
3D Electrostatic Actuator
XY-motion
Alignment of the optical cavity with fibre
Correction von bonding misalignment
Z-motion
Tunable
optical cavity
Distance [um]
0 2 4
0
50 100
Voltage [V]Slide9
Nan0
Alignment
Bonding
Demonstrated 200nm alignment bonding at chip
level (2cm x 2cm)
Only 10% of wafer area required for self-engaging structures
Wafer surface smooth enough for thermo-compression bonding
self-engaging alignment concept
using cantilevers
SEM image of aligned and
bonded chips
Vernier
structures to evaluate
bonding alignment
IR image of a bonded sample
2.3mm
‘LEGO on a chip’Slide10
Integrated chips for manipulation and trapping of ions or charged particlesRF Paul Trap
Applications similar to Atom Chips(Semi-) Planar Paul TrapsCompatible with
microfabrication technology
Ion ChipsSlide11
Ion
Traps
With Shielded Dielectric
Field simulation
Y-Shaped Trap
SEM Picture
Wet etching 50/500nm Cr-Au
DRIE 30um Si device layer
O
vercome
the problem of
exposed
dielectrics
impeding the stability of
trap
R
etain
the simplicity of fabrication Slide12
The trap is well suited for trapping large array of single ions and perform quantum simulations2D ion trap arrays comprises of an RF metal above a grounded plane electrode
Ion
2D Lattice TrapSlide13
Micro-Particle Injection System
für Laser Applications
Micro-particle
i
njection for Laser chambers
→
s
econdary radiation for medical applications, material testing,
etc
Electrostatic MEMS „rail gun“ (linear electrostatic motor)Slide14
Electro-magnetic Levitation
Electromagnetic Levitation System and
RailgunSlide15Slide16Slide17Slide18
Bio-sensing
Probe Application
Arthroscopic AFM sensor probe technology
Cartilage
health monitoring and analysis
Uses micro and
nano
-indentation approach to characterise tissue stiffness
[Ref: Stolz, et al., Nature Nanotechnology, 2009]
Ref: M. Stolz, J. Biophys., Vol 88, 2731-2740, 2010
Probes interaction with cartilage fibres using (A) micro-sphere probe tip and (B)
nano
sharp tip.
M. Stolz, Biophysical J., 98, 2010.Slide19
2 µm
Early
Concept
and Prototype
Sharp AFM cantilever tip to improve indentation resolution (Tip radius 20nm -10nm)
Multiple probes for large area sensing
Robust design to withstand operation stress
Integrated readout with capacitance or
piezoresistance
information
Self actuation AFM probe sensor design based on capacitive/
piezoresistive
readout
SEMs
of AFM prototype device fabricated on SOI material
Readout structures
Cantilevers
Probe tips
Cantilever length 500µm, 80µm & 3µm thick. Freq. = 40 kHz & k = 5.5 N/m.Slide20
Conclusions
MEMS can provide a toolkit for
nanoscale
manipulation of
nano
-sized objects.
These include trapping, detecting and shuffling of ions and atoms,
moving around small objects contactless,
a
nd probing material, including biological tissue, at the nanoscale
.There are many other examples.Slide21
Thank you!