Tim Stucchi Sensera Operations Manager 2 MEMS M icro E lectro M echanical S ystems A technique of fabricating Electrical and Mechanical elements on a chip with miniature dimensions ID: 656325
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Introduction to MEMS
by
Tim Stucchi
Sensera
Operations ManagerSlide2
2
MEMS?
M
icro-
E
lectro-
Mechanical-Systems A technique of fabricating Electrical and Mechanical elements on a chip with miniature dimensions Miniature means dimensions less than the width of a human hair (<100 microns; 1 um = .00004 inches).
MEMS vs. Dust Mite vs. Ant’s LegSlide3
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MEMS & Nano Scale
A 6’ man is 1.83 meters or 1.83M umSlide4
How are MEMS Made?
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MEMS Micromachining
Electrostatic comb actuator/Surface Acoustic Wave TransducerSemi Isolated Features
Elements of Microfluidic pump
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Examples of MEMS Devices
Resonator
Accelerometer
Probe
Robotic Hands
Micro mirrorsBiopsy forceps
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MEMS Devices are Everywhere
Mobile Electronics
Communications
Automotive
BiomedicalSlide8
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MEMS Market SegmentsSlide9
Marriage Counselor for Manufacturers
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A Field Sales Company
25 Webb Street
Middleton, MA 01949-1724
John M. Knott
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Sales Agent for
Sensera
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