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Northern Illinois University’s ion beam sputtering system Northern Illinois University’s ion beam sputtering system

Northern Illinois University’s ion beam sputtering system - PowerPoint Presentation

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Uploaded On 2017-06-19

Northern Illinois University’s ion beam sputtering system - PPT Presentation

for boron deposition on a CCD Donna et al 17May2013 Special thanks to Gregg Westberg NIU who is leading the effort at NIU Goal Deposit 3 um of Boron10 on the SiO 2 surface of a CCD ID: 561134

boron beam target ion beam boron ion target sputtering ccd deposition system mrdl modifications fixture holder film sputter cooling

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