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MEMS Tutorial Pullin voltage in electrostatic microact MEMS Tutorial Pullin voltage in electrostatic microact

MEMS Tutorial Pullin voltage in electrostatic microact - PDF document

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Uploaded On 2015-04-06

MEMS Tutorial Pullin voltage in electrostatic microact - PPT Presentation

Figure shows the schematic of an electrostatic actuator that could be used for example as a tunable RF capacitor When voltage is applied over the capacitance electrostatic force will work to reduce the plate separation At small voltages the electro ID: 48677

Figure shows the schematic

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