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NanoFab NanoFab

NanoFab - PowerPoint Presentation

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Uploaded On 2017-09-03

NanoFab - PPT Presentation

Trainer Update Nick Reeder March 14 2014 Change to Materials Database Added Cl 2 BCl 3 CHCl 3 N 2 plasma as an etchant Retained the Cl 2 He plasma which I had added previously ID: 584926

photoresist code write evap code photoresist evap write layer µm user exposure implement sputtered0 cvd provide substrate rates etch

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