Why Bother Shock Equipment Fire NonElectrical Semiconductor Eric Sklar Principal Safety Guru LLC sklarsafetygurucom 11 April 2016 Eric Sklar 11 April 2016 2016 Safety Guru LLC ID: 559164
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Design for Compliance: Why Bother? Shock Equipment Fire Non-Electrical Semiconductor
Eric Sklar, PrincipalSafety Guru, LLCsklar@safetyguru.com11 April 2016
Eric Sklar, 11 April 2016© 2016 Safety Guru, LLC
IEEE Consultants’ NetworkSlide 1 of 23
Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide2
Why “Bother” with Compliance?Compliance by your product may be required for you to be allowed to sell itCompliance by your product may be required for your customer to be allowed to use itCompliance by your customer’s product may be required for him to be allowed to sell itThe requirements that apply to your customer’s product may include compliance by your productYour customer may believe (rightly or wrongly) that buying a compliant component/module/subsystem makes it easier to make and sell a compliant systemIn some cases, compliance is an acceptable substitute for safety engineeringClassic example: wire sizing
Eric Sklar, 11 April 2016© 2016 Safety Guru, LLCIEEE Consultants’ NetworkSlide 2 of 23Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide3
Why “Bother” During Design?Getting to compliance is required, but You choose when you get to compliance Design a compliant productDesign a product, then revise the design during design reviewDesign a product, build a prototype, then modify the designDesign a product, build a warehouse-full, then modify/rebuildDesign a product, build it, ship it, replace or field-modify Back in 1971
Eric Sklar, 11 April 2016© 2016 Safety Guru, LLCIEEE Consultants’ NetworkSlide 3 of 23Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide4
Why “Bother” During Design?You choose when you get to compliance (continued)Rule of thumb: Each step in product lifecycle increases the cost of correction by an order of magnitude. That sounds absurd, but consider this example:Costs for this example:Engineers $2/minTechnicians $1/min
Wrong wire $1/unitVolume production $1,000/unitTravel per person $
2,000/week
Designing Correctly:
Looking up the required wire: 5 min @ $2/min $10
Eric Sklar, 11 April 2016
© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide5
Why “Bother” During Design?You choose when you get to compliance (continued)Find error in design review:Discussion: 5 min by 5 people @ $2/min $50Documentation of error: 5 min @ $2/min
$10Determining correct design: same as above $10Documentation of design revision: 10 min @ $2/min
$20Closing review item: 1 min by 5 people @ $2/min
$10
Total $110
Eric Sklar, 11 April 2016
© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide6
Why “Bother” During Design?You choose when you get to compliance (continued)Find error in prototype (1 unit):Cost of correcting error in design $110Dismantle, change wire, reassemble:4 hours @ $2/min $480Cost of discarded wire $1
Total $591Eric Sklar, 11 April 2016© 2016 Safety Guru, LLCIEEE Consultants’ NetworkSlide 6 of 23
Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide7
Why “Bother” During Design?You choose when you get to compliance (continued)Find error after start of production (50 units):Cost of correcting error in design $110Dismantle, change wire, reassemble:50 units @ 2 hours @ $1/min $6,000Cost of discarded wire $50
Total $6,060Eric Sklar, 11 April 2016© 2016 Safety Guru, LLCIEEE Consultants’ NetworkSlide 7 of 23Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide8
Why “Bother” During Design?You choose when you get to compliance (continued)Rolling replacement of fielded product (500 units):Cost of correcting error in design $110Spare units: 25 units @ $1,000/unit $25,000Shipping and handling: 500 units @ $50/unit $25,000Dismantle, change wire, reassemble:
475 units @ 2 hours/unit @ $1/min $57,000Cost of discarded wire $475Total $107,585
You get a “bonus” of 25 non-compliant units at the end of the process.
Note, however, that this cost model assumes that the units are returned
by
customers and
can be corrected and sent to other customers. If that’s not the case, you’ll need more spares or very patient customers.
Eric Sklar, 11 April 2016
© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide9
Why “Bother” During Design?You choose when you get to compliance (continued)Fix error in fielded product (50 units at each of 10 customer sites):Cost of correcting error in design $110Dismantle, change wire, reassemble:10 sites x (50 units @ 2 hours @ $1/min)
$60,000Travel costs:10 sites x (3 weeks/site) x ($2000/week) $60,000Cost of discarded wire $500
Total $120,610
Eric Sklar, 11 April 2016
© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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Why “Bother” During Design?You choose when you get to compliance (continued)The difference between getting the initial design right and doing field correction: $120,600This example assigned no value to:delay of product release,
delay of product delivery,regulatory penalties, orcustomer good willEric Sklar,11 April 2016© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide11
Equipment in GeneralShockEquipment FireNon-Electrical
Eric Sklar, 11 April 2016© 2016 Safety Guru, LLCIEEE Consultants’ NetworkSlide 11 of 23Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide12
Shock: Technical ConsiderationsPower: Supplied and DerivedVoltageCurrentLive conductor accessibilityNormal UseMaintenance and Service (“authorized” and otherwise)Foreseeable wear
Accessible conductive parts: isolation from live conductorsInsulationSpacing (creepage and clearance)
Foreseeable conditions (such as someone leaning on a cabinet)
Grounding & BondingEquipment to earth
Within equipment
Eric Sklar, 11 April 2016
© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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Fire: Technical ConsiderationsFire requires:Three elements: fuel, oxidizer, source of ignitionIn the same placeAt the same timeFuelMaterials of constructionMaterials being processed or used for processingOxidizerPresent in terrestrial use, unless deliberately excluded
Exclusion may not be difficult, but it’s often expensive and is subject to failureSource of ignitionElectrical: heating (normal and abnormal behavior) and arcing & sparkingThermochemical: heat of reaction and
self-ignitionMechanical:
friction, sparking, and compression
Eric Sklar, 11 April 2016
© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide14
Non-Electrical: Technical ConsiderationsMechanicalEntanglement and entrapmentPinching, cutting, crushingThermalHigh (>50ºC) temperaturesLow (<0ºC) temperatures
ChemicalExposure (inhalation, injection, absorption, ingestion)Reaction energyErgonomicHuman capabilitiesInjury (acute and cumulative)Seismic
Direct injury
Damage to functionFailure of safety measures
Eric Sklar, 11 April 2016
© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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Examples of Documents:IEC (International Electrotechnical Commission)IEC 60204 Electrical Equipment of MachinesPart 1: General requirementsPart 11: Requirements for HV equipmentPart 31: Particular safety and EMC requirements for sewing machines, units and systemsPart 32: Requirements for hoisting machinesPart 33: Particular requirements for semiconductor manufacturing equipmentIEC 60950 Information technology equipment - Safety
Part 1: General requirementsPart 21: Remote power feedingPart 22: Equipment to be installed outdoorsPart 23: Large data storage equipmentIEC 61010 Safety requirements for electrical equipment for measurement, control, and laboratory use Part 1: General requirements
Numerous other parts for particular types of equipment.
IEC 61511 Functional Safety – Safety instrumented systems for the process industry sector
Eric Sklar, 11 April 2016
© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide16
Examples of Documents:NFPA (National Fire Protection Association)NFPA 79: Electrical Standard for Industrial MachineryNFPA 30: Flammable and Combustible Liquids CodeNFPA 52: Vehicular Gaseous Fuel Systems CodeNFPA 56: Standard for Fire and Explosion Prevention During Cleaning and Purging of Flammable Gas Piping SystemsNFPA 86: Standard for Ovens and FurnacesNFPA 87: Recommended Practice for Fluid HeatersNFPA 260: Standard Methods of Tests and Classification System for Cigarette Ignition Resistance of Components of Upholstered Furniture
NFPA 262: Standard Method of Test for Flame Travel and Smoke of Wires and Cables for Use in Air-Handling SpacesNFPA 318: Standard for the Protection of Semiconductor Fabrication FacilitiesNFPA 496: Standard for Purged and Pressurized Enclosures for Electrical EquipmentNFPA 497: Recommended Practice for the Classification of Flammable Liquids, Gases, or Vapors and of Hazardous (Classified) Locations for Electrical Installations in Chemical Process Areas
Eric Sklar, 11 April 2016
© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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Examples of Documents:UL (Underwriters’ Laboratories)UL 22: Standard for Amusement and Gaming MachinesUL 30: Standard for Metal Safety CansUL 50: Standard for Enclosures for Electrical EquipmentUL62: Flexible Cords and CablesUL310: Electrical Quick-Connect TerminalsUL489: Molded-Case Circuit Breakers, Molded-Case Switches, and Circuit Breaker EnclosuresUL508: Standard for Industrial Control Equipment
UL508A: Standard for Industrial Control PanelsUL745-1: Portable Electric ToolsUL758: Standard for Appliance Wiring MaterialUL842: Standard for Valves for Flammable FluidsUL1030: Standard for Sheathed Heating ElementsUL1077: Standard for Supplementary Protectors for Use in Electrical Equipment
UL60950: Information technology equipment – Safety (Parts as in IEC 60950)
UL61010: Safety requirements for electrical equipment for measurement, control, and laboratory use (numerous parts)
Eric Sklar, 11 April 2016
© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide18
Semiconductor Manufacturing EquipmentEric Sklar, 11 April 2016© 2016 Safety Guru, LLCIEEE Consultants’ NetworkSlide 18 of 23Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide19
Semiconductor Manufacturing EquipmentThis industry has, through Semiconductor Equipment and Materials International (SEMI) created a suite of “Safety Guidelines” for the equipment.Although they are called “guidelines”, most are contractually imposed as requirements by semiconductor device manufacturersSEMI reserves the rights to making official interpretationsEric Sklar, 11 April 2016
© 2016 Safety Guru, LLCIEEE Consultants’ NetworkSlide 19 of 23Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide20
Semiconductor Manufacturing EquipmentSEMI Safety Guidelines permit assessment and certification by equipment suppliers, but most device manufacturers demand third-party certification.SEMI does not certify either equipment or assessorsThere’s a broad range of skill and rigor among assessorsSome equipment suppliers favor assessors who are less rigorous
Some device manufacturers require their suppliers to use assessors that are considered more skilled or more rigorous.Eric Sklar, 11 April 2016© 2016 Safety Guru, LLCIEEE Consultants’ NetworkSlide 20 of 23
Design for Compliance: Equipment Fire, Shock, Non-Electrical, SemiconductorSlide21
Semiconductor Manufacturing EquipmentThe primary document related to equipment is SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing EquipmentSEMI S2 explicitly allows conformance by design or by performance and regards them as equivalentEquivalence was the agreement after many years of vigorous debate
There are still parties in the industry who deny the equivalence, demanding conformance by designEric Sklar, 11 April 2016© 2016 Safety Guru, LLCIEEE Consultants’ NetworkSlide
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Semiconductor Manufacturing EquipmentOther documents, many of which are cited or incorporated by reference by SEMI S2, include:SEMI S1 Safety Guideline for Equipment Safety LabelsSEMI S3 Safety Guideline for Process Liquid Heating SystemsSEMI S6 EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing EquipmentSEMI S8 Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S14 Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing EquipmentSEMI S16 Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of LifeSEMI S17 Safety Guideline for Unmanned Transport Vehicle (UTV) SystemsSEMI S18 Environmental, Health and Safety Guideline for Flammable Silicon Compounds
SEMI S22 Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
SEMI S25 Safety Guideline for Hydrogen Peroxide Storage & Handling SystemsSEMI S26 Environmental, Health, and Safety Guideline for FPD Manufacturing System
SEMI S28 Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment
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© 2016 Safety Guru, LLC
IEEE Consultants’ Network
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DisclaimersThis presentation is provided as general information, not as specific advice to any current, former, or potential client or as relevant to any particular design or product.The examples provided are for illustration and do not necessarily report observed reality.The codes, regulations, standards, and guidelines cited are not applicable to all products.Other
codes, regulations, standards, and guidelines may be applicable to each product.Eric Sklar, 11 April 2016© 2016 Safety Guru, LLCIEEE Consultants’ NetworkSlide 23 of 23Design for Compliance: Equipment Fire, Shock, Non-Electrical, Semiconductor