The SUSS PA200 Semiautomatic Probe System is available as - PDF document

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  The SUSS PA200 Semiautomatic Probe System is available as two versions, one for high speed (HS) and one for highresolution (HR) applications. They are both very stable, modu-lar and flexible probe systems for wafers and substrates up toThe standard ProberBenchOperating System provides easeofuse and programmed automation for the most demandinganalytical applications. The modular design is effective, ver-satile and has a defined upgrade path. $!%$
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'$&$(Application flexibility for failure analysis,design and verification, parametric and $
 PA200HR/HS 14.09.2001 10:18 Uhr Seite 1 OUR SOLUTIONSSET STANDARDS 
 
 The value offailure analysis increases as its impact on cus-tomer satisfaction, yield, quality and reliability is realized. This Analytical DC test High frequency test Automated MCM test PA200HR/HS 14.09.2001 10:16 Uhr Seite 2 

Lab environments also influence the design ofsemiautomatic probers.In open labs with dozens ofusers, to operate. On the other hand, a proberwith a dedicated user should also maximize performance.The SUSS PA200 SemiautomaticProbe System meets these challenges through innovative design, precisionand reliability.A Graphical User Interface pro-vided by the renowned SUSSProberBench software makesthe PA200 a fully functional,flexible yet simple tool wherefor individual tasks.Adaptation to the height differences between wafers andpackaged parts is accomplished by the chuck and platenhaving 30/15 (HR/HS) and 20 mm oftravel respectively, for approx. 50 mm (2) ofworking clearance. DUT boards aresecured by vacuum to the standard wafer chuck, so chuckplanarity is not affected.The ProberBenchOperating System is a powerful multi-tasking system with joystick controller, graphical and remoteinterfaces. The Windowsbased graphical interface includesNavigator on-screen joystick and setup, TableView spread-sheet, graphical WaferMap and optical VideoTracker naviga-tion and data acquisition modules. Standard remote inter-faces are IEEE488 and RS232. The prober is fully operablewithout a PC. A typical CAD Navigation set-up
!The SUSS PA200 Semiautomatic Probe System relies on acast base frame and massively machined components to pro-vide an extremely stable probing environment as well as soft-ware compensation. Precise resolution and accuracy resultsfrom using a ball-screw drive and glass scales in closed-looppositioning. 
"Modular construction provides application flexibility and costeffectiveness. Microscope mounts include fixed, manual andprogrammable, as well as programmable focus and magnifi-cation. ProbeHead platens are available for DC, HF and spe-cialized applications, with fixed or manual movement. The standard chuck secures single chips to 8wafers;optional chucks handle fragile III-V compound wafers andrectangular substrates. 
   Laser Cutting PA200HR/HS 14.09.2001 10:16 Uhr Seite 3 OUR SOLUTIONSSET STANDARDS 
 Application flexibility is defined by the diversity ofapplica-tions, as well as the specific requirements ofeach. There aremany aspects to consider: Measurement type and integrity,integration into a test system and how the user interacts with the system as well as mechanical stability and accuracy.specific design and with our wide range ofaccessories."#

For DC parametrics, the software can be configured as asimple, easy to use interface for scanning a wafer during fast step-and-repeat patterns. Hardware choices include high pin-count probecard adapters, triaxial probes, chucks(standard and thermal), and the SUSS ProbeShieldfor lowcurrent and capacitance measurements. The unique removes power to all motors to reduce the noise floor.SUSS precision allows the reliable, automatic probing oftran-sistors and the smaller pads ofmonitor chips.  
$ For failure analysis mechanical versatility provides quickchangeover between packaged parts and wafers. The ProberBench operating system has been integrated with the most common failure analysis tools, including emissionmicroscopes, CAD navigation software, laser cutters and data acquisition/analysis software. All ProbeHeads can be simultaneously used with a probecard and with activeprobes. SUSS stability allows the smallest features to be easily probed at the highest magnifications, especially when used with the SUSS MFI Probe for scanning and probing below 0.2µm.%!
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The SUSS PA200 has the stability for HF on-wafer probingwithout compromising flexibility. A complete range ofacces-sories for probing up to 220GHz is available and includes:Probes, calibration substrates and software, positioners,chucks, cables and IC-CAP interfacing.' 
(The SUSS ProbeShield also provides an innovative approachto probing down to Ð65¡C. Frost-free low temperature probingrequires that the air surrounding the cold chuck is pressuriz-ed, clean and dry. Just enough pressure is required to keepthe ambient air out ofthe chamber. The air is dried so that itsdew point is lower than the chuck temperature.For thermal low signal applications, SUSS supplies a range oflow leakage thermal chucks up to 300¡C. PA200 with ProbeShieldEMC for low signal and low temperature probingPA200 high frequency application PA200HR/HS 14.09.2001 10:16 Uhr Seite 4 microscopeis supported by a cast aluminum bridge for stability at the highestmagnifications. The bridge design allowsrearward access for cable routing. The cantilevered load ofa microscope is a design challenge addressed by using bearing ways. The programmable micro-scope movement closed loop DC servo drive provides 50mm oftravel. Softwarecompensation is used, and is aligned to the chuck stage for parallel movementbetween the stages. Programmable focus,and magnification on some microscopemodels, is also available.ProbeHead Platenis the most versatile component ofaprober. For DC applications the material is typically aluminumwhich is hard-coated for durability and uses vacuum hold-down. High frequency applications require greater rigidity,therefore steel is used for magnetic, bolt-down and kinematicmounting. Probecard adapters are available for all platens.Although the platen can be mounted in a fixed position, a manual drive mechanism is more commonly used. Themechanism consists offour columns with ball-cage bearingsproviding an extremely stabile, linear and repeatable move-ment. The drive knob, conveniently located at the left front corner, provides a fine 400µm contact/separation stroke, as well as 20 mm ofcoarse travel for adjusting to test fixturing and thermal chucks.The mechanics are controlled by the SUSSProberBenchOperating Systemconsisting ofthe drive electronics, joystick controller and Windows user interface. Interfacingflexibility is provided with an IEEE488 port in the electronicsand an IEEE488 and an RS232 port in the PC. All ports can be used simultaneously. This is the same for all SUSS Probe Systems. 
 The prober mechanics are based on a web-reinforced, alu-minum casting for excellent rigidity and vibration damping.The wrap-around design places the stage and platen drivesinto, rather than on top of, the base further increasing stabil-ity. All surfaces are finished in cleanroom grade paint or areanodized.X-Y stageis constructed ofsteel for temperature sta-bility. Linear accuracy and torsional stiffness are enhancedwith wide spaced bearings and the use ofground in place ofthe more typical rod and ball slides. A ball-screw drive isutilized which automatically compensates for wear andensures the system will remain backlash-free. The DC servoclosed loop positioning system uses linear encoders to read the actual stage position and to preclude leadscrewinduced thermal errors. In addition to the superior mechani-cal design, two software compensation routines are used:linear and matrix. ÒLinearÓ adjusts positioning by an equalamount over the 200 mm travel range and can be used to correct thermal chuck induced wafer expansion/contraction.ÒMatrixÓ maps the stage throughout its travel for finer accu-racy. Axes orthogonal error is also compensated. The Z andtheta axes are DC servo closed loop driven. CCD CameraPH600Programmable ProbeHead Microscope PH150Analysis ProbeHead Microscopebridge Joystick User Interface SUSS PA200 Semiautomatic Probe System PA200HR/HS 14.09.2001 10:16 Uhr Seite 5 OUR SOLUTIONSSET STANDARDS

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 The drive electronics which use standard SUSS componentscabinet. As a separate unitthere is greater flexibility. Furthermore the mechanics aresmaller and electrically quieter. All motorized prober functions are integrated at the electron-ics, so there are no additional boxes or controllers. In additionto the chuck and microscope stages, up to four ProbeHeadsand two contact sense cards can be accommodated. The system complies with leading guidelines, including SEMIS2-93, IEC 204-1 and EC-Low Voltage Directive (CE-Mark)) *
# The joystick controller is solidly constructed ofstainless steel and uses rotary encoders for proportionally precise, uni- or bi-directional control. It is more than a simple joystickcontroller, providing full prober functionality via fixed and LED-defined programmable keys. Included are two-point theta alignment, setting index, home and contact, as well as go load and scope lift are provided.
user interface consists ofjoystick, spread-sheet, graphical and video control modules. Navigatoron-screen joystick providesnavigation by mouse and the entry ofall setupparameters. TableViewcontrols stage movement by co-ordinates, which are in spreadsheet format and are entered by recording the current posi-tion, keyboard, pasting and importing. Up to 96 columns are available for test results, binning or comments. The graphical WaferMapquickly move to dies using coordinates or as part ofan automated test routine and has sub-site probing capability. VideoTrackerconveniently displays a videoimage in a window ofthe PC monitor and has the ability to save the image to disk. Chuck, microscope andProbeHead positioning is as simple as clicking on the image. All setup parameters are contained in project files, whereasthe data from the TableView and WaferMap modules is savedin ASCII-format files for easy transfer to and from other instru-ments. Temperature compensations are no longer necessaryas seperate wafer maps with different temperature settingscan be stored for the same project.This electronic rack, joystick controller and user interfacecombination is common to all SUSS programmable ProbeSystems, thus reducing the learning curve and ensuring com-patibility ofinstrument and software drivers. ProberBench within the SUSSCAL Calibration Software PA200HR/HS 14.09.2001 10:17 Uhr Seite 6 


 
  ApplicationVendors CAD NavigationKnights Technology, Schlumberger, Raith Emission MicroscopyHypervision, Hamamatsu, EDO Barnes Data AcquisitionMetrics ICV, NI LabView, Lab Windows/CVI, Keithley, TestPoint, Mosaid, Agilent VEE Design and ModelingAgilent IC-CAP, Silvaco ProgrammingMS Visual Basic, C++, Delphi Laser CuttingNew Wave Research Thermal ChucksTemptronic, ERS, Trio Tech (%
  
 Stage typeTravelResolutionAccess lift optionsRecommended microscopeApplication Programmable5050 mm 0.25 µmStandard 80 mm pneumaticHigh magnification Internal die navigationor 130 mm motorizedor stereo viewand remote control Manual5050 mm40 mm/rev.Fixed, manual orHigh magnificationInternal die pneumatic tilt-backor stereo view High resolution5050 mm0.25 mm/revFixed, manual High magnificationInternal die and laser cuttingmanualor pneumatic tilt-back Adjustable3030 mmFixedStereo viewMinimal movement required Microscope typeModels availableApplication Stereo viewOlympus SZ4045 Series, Leica M5-12 SeriesPad probing and internal features down to 5 µm High magnificationMitutoyo FS-70 Series, A-ZoomOffers the most flexibility and options for features down to 0.5 µm w/out EyepiecesOptemHF applications and use with TV systems PH MountsApplication VacuumMost common, offers ease ofuse and flexibility MagneticOffers more rigidity than vacuum. Commonly used whenmagnetic base ProbeHeads are already used MechanicalMechanical T-nut mount providing high rigidity HF UniversalOffers vacuum, magnetic, bolt down and kinematic mounting. Kinematic requires additional kit CustomizedCustom designs are available for specialized applications,such as testhead docking, substrates and MCM test 
 Probes:Active, passive, HF, triaxial, coaxial, low impedance, Kelvin Probe tips:Tungsten, tungsten-carbide, palladium, copper shaft Probecards:SUSS supports all major probecard manufacturers Manual ProbeHeads:Contacting bond pads & internal nodes down to 1 µm Remote controlled ProbeHeads:For submicron probing, programmable ShieldEnclosure SE1000:Light-tight or EM-shielded versions Laser cutter:Depassivating, cutting traces, trimming and blowing fuses Ultrasonic cutter:Depassivating brittle materials Vacuum, pressure or combinations Standard chucks:From 4(100Ð200 mm), usually made ofstainless Triaxial chucks:For low-signal measurements High insulation chucks:Power device test, low capacitance demands Microwave chucks:Designed for brittle III-IV compounds and high measure-ment stability. Auxiliary chucks for calibration and burnishing substrates Thermal chucks:Adaptor kits for all hot chucks on the market available ProbeShieldCompletly light-tight, gas-tight and EM-shielded design for low-signal and frost-free low temperature probing Material handling:Provides system automation, as well as eliminates userhandling, and possible damage to wafers Pattern recognition:Complete system automation for cassette-to-cassetteoperation, vision module Packaged device holders:Held down by vacuum on the chuckÕs surface Fixtures and chuck accessories:Quickly manufactured to hold down sub-strates, provide alignment pins, or allow bottom side probing Standard: stainless steel. Options: gold plated, Tefloncoated, aluminum hard coated, nickel plated Camera and monitors:Facilitates contact bond pads or internal nodes Tables:Vibration isolation tables VIT 800, 801, 802, depending on application $ PA200HR/HS 14.09.2001 10:17 Uhr Seite 7 ! "
  

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, North AmericaKARL SUSS America, Inc.228 Suss Drive á Waterbury Center, VT 05677 á USAPhone (802) 244-5181 á Fax (802) 244-5103KARL SUSS America, Inc.Regional Sales+Service Center8240 S.Kyrene Road á Suite 101 á Tempe, AZ 85284 á USAPhone (480) 557-9370 á Fax (480) 557-9371 KARL SUSS America, Inc.Regional Sales+Service Center2694 Orchard Parkway á San Jose, CA 95134-2020 á USAPhone (408) 432-3071 á Fax (408) 432-3072GermanyKARL SUSS KG GmbH & Co.Schleissheimer Strasse 90 á D-85748 Garching b. MŸnchen á GermanyPhone (+49)-[0] 89/3 20 07-0 á Fax (+49)-[0] 89/3 20 07-162SŸss - Strasse 1 á D-01561 Sacka b. Dresden á GermanyPhone (+49)-[0] 35240-73-0 á Fax (+49)-[0] 35240-73-700KARL SUSS Vaihingen GmbHPlanckstr. 9 á D-71665 á Vaihingen/Enz á GermanyPhone (+49)-[0] 7042 / 955-0 á Fax (+49)-[0] 7042 / 955-100FranceKARL SUSS France S.A.Avenue des Colombires á F-74490 Saint Jeoire á FrancePhone (+33) [0] 4 50 35 83 92 á Fax (+33) [0] 4 50 35 88 01Great BritainKARL SUSS Great Britain Ltd.23 Ivanhoe Road á Hogwood Lane Industrial EstateFinchampstead á Wokingham á BerkshireGB - RG40 4QQ á EnglandPhone (+44) [0] 11 89-732144 á Fax (+44) [0] 11 89-734395JapanKARL SUSS Japan K.K.GITC 1-18-2, Hakusan, Midori-ku á Yokohama, Kanagawa 226-0006Phone (+81)-45-931-5600 á Fax (+81)-45-931-5601KARL SUSS Asia Co., Ltd.212/2 Soi Ladprao 10Ladprao Road, Ladyao á Jatujak á Bangkok 10900 á ThailandPhone (+66)-2 938 44-26, -27 á Fax (+66)-2 512 5569Come visit our website!www.suss.comRepresentatives in over 30 countries. Please ask for our address list. Chuck StageX-Y MovementClosed-loop, DC servo with linear encoder feedbackHRHSTravel200200 mm200Resolution0.5 µm1.0 µmRepeatability±1.0 µm±2.0 µmAccuracy±1.5 µm±5.0 µmPlanarity8 µm8 µmMaximum speed50 mm/sec100 mm/sec Z MovementDC servo with rotary encoder feedbackHRHSTravel30 mm15 mmResolution0.25 µm0.25 µmRepeatability±1.0 µm±1.0 µm Theta MovementDC servo with rotary encoder feedbackTravel±6.0¡Resolution0.0001¡ Programmable Microscope MovementDC servo with rotary encoder feedbackTravel50Resolution0.25 µmRepeatability±1.0 µmAccuracy±2.5 µmAccess lift80 mm pneumaticor 130 mm motorized Manual Platen MovementDrive typeCompound knobContact/separation stroke0.4 mm linearCoarse adjustment20 mm Graphical User Interface Remote InterfacesPCRS232, IEEE488ElectronicsIEEE488 Power115/230V, 50/60Hz, 500WVacuumLess than 200 mbar absCompressed air4 bar minVacuum/air inputs6 mm, 1/4 Mechanic (microscope in raised position)742Electronics (with connectors installed)520 Joystick controller(with connector installed)260 WeightMechanics133 kg, 300 lbElectronics13 kg, 28 lb Data depends on individual process conditions and will vary according to equipment configurations $-..%/% ( PS.PA200.T/B.0801.1.SGM, Copyright, Karl Suss ©2001 PA200HR/HS 14.09.2001 10:17 Uhr Seite 8