Progress in AberrationCorrected HighResolution Transmission Electron Microscopy Using Hardware Aberration Correction Markus Lentzen Institute of Solid State Research Ernst Ruska Centre for Microscopy
The corrected instrument a Philips CM200 FEG ST has an information limit of better than 013 nm and the spherical aberration can be varied within wide limits even to negative values The aberration measurement and the corrector c ontrol provide instru
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