PPT-Better automation for lateral mark alignment
2 additional camera for measurement of marks 4 marks with 2 steps by fixing on main optics Idea of 2 additional cameras is already engaged in Japanese system however
Download Presentation
Download Note : "Better automation for lateral mark alignment" is the property of its rightful owner. Permission is granted to download and print materials on this website for personal, non-commercial use only, provided you retain all copyright notices. By downloading content from our website, you accept the terms of this agreement.
Presentation Transcript
Transcript not available.